Patents by Inventor Terry Parde

Terry Parde has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adapter Ring For Silicon Electrode
    Publication number: 20120073752
    Abstract: Methods and systems are provided for retrofitting wafer etching systems. The methods and systems use an adapter ring to retrofit wafer etching systems designed for use with multiple piece electrodes such that single piece electrodes can be used in the etching systems. A portion of the adapter ring is disposed in a receptacle formed in a thermal coupled plate in the wafer etching system. Another portion of the adapter ring is positioned in a channel formed in an upper electrode.
    Type: Application
    Filed: September 20, 2011
    Publication date: March 29, 2012
    Applicant: MEMC ELECTRONIC MATERIALS, INC.
    Inventor: Terry Parde