Abstract: A fiber optic temperature probe is disclosed. The fiber optic temperature probe includes a probe shaft containing an optical fiber. An optical temperature sensor element is coupled to the probe shaft and configured to be excited by light from the optical fiber and emit light back to the optical fiber. A thermally conductive plate is coupled to the probe shaft and interfaces with the optical temperature sensor element. Baffling extends from the probe shaft and surrounds the edges of the thermally conductive plate.

Abstract: A plasma processing chamber optical temperature sensor is disclosed. The plasma processing chamber optical temperature sensor includes a light source, a light detector, and a means for transmitting light through a wall of a plasma processing chamber. An optical temperature sensing element is thermally coupled to a plasma processing chamber component within the plasma processing chamber. The optical temperature sensing element includes a monolithic crystalline phosphor element configured to be excited by light from the light source and to emit light back to the light detector indicative of a temperature of the monolithic crystalline phosphor element.

Abstract: A plasma processing chamber optical temperature sensor is disclosed. The plasma processing chamber optical temperature sensor includes a light source, a light detector, and a means for transmitting light through a wall of a plasma processing chamber. An optical temperature sensing element is thermally coupled to a plasma processing chamber component within the plasma processing chamber. The optical temperature sensing element includes a monolithic crystalline phosphor element configured to be excited by light from the light source and to emit light back to the light detector indicative of a temperature of the monolithic crystalline phosphor element.

Abstract: A fiber optic temperature probe is disclosed. The fiber optic temperature probe includes a probe shaft containing an optical fiber. An optical temperature sensor element is coupled to the probe shaft and configured to be excited by light from the optical fiber and emit light back to the optical fiber. A thermally conductive plate is coupled to the probe shaft and interfaces with the optical temperature sensor element. Baffling extends from the probe shaft and surrounds the edges of the thermally conductive plate.

Abstract: A probe for use within a high voltage and high current electrical device is disclosed. The probe comprises an optical fiber, a substrate having a slot, and a photoluminescent material. The fiber has a first and second end and is configured to convey an activation light from the first to second end. A portion of the fiber is within the slot such that the slot receives the second end of the fiber. Emission of the photoluminescent material, as a function of temperature, is known. The photoluminescent material is disposed within at least a portion of the slot that faces the second end of the fiber so that they are in optical communication with each other. A change in intensity of a luminescent light emitted back into the fiber by the photoluminescent material when the activation light is conveyed by the fiber onto the photoluminescent material provides an indication of the integrity of the electrical device.

Abstract: A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the object to be measured. A first light waveguide is attached to the contact and is configured to transmit the electromagnetic radiation from the contact. The sensor has a guide with a bore formed therein that the first waveguide is insertable into. When the contact is moved, the first waveguide moves within the bore. A second waveguide is attached to the guide such that a variable gap is formed between the ends of the first waveguide and the second waveguide. Electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide. The guide allows the first waveguide to move with the contact in order to ensure that the contact is fully engaged with the surface of the object.