Patents by Inventor Terry T. Sheng

Terry T. Sheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charge monitor for high potential pulse current dose measurement apparatus and method
    Patent number: 5572038
    Abstract: A charge measuring system for determining implantation dose in a PI.sup.3 system with means to compensate for current in the charge sensor which does not arise from positive ions arriving on the wafer.
    Type: Grant
    Filed: May 7, 1993
    Date of Patent: November 5, 1996
    Assignee: Varian Associates, Inc.
    Inventors: Terry T. Sheng, Charles B. Cooper, III, Susan B. Felch, Charles E. Van Wagoner
  • Plasma immersion ion implantation (PI.sup.3) apparatus
    Patent number: 5354381
    Abstract: Implantation apparatus for cold cathode plasma immersion ion implantation (C.sup.2 PI.sup.3) without a continuous plasma using very short high voltage, low duty cycle ionization pulses, in conjunction with a synchronously produced electron flow to neutralize positively charged wafer surfaces.
    Type: Grant
    Filed: May 7, 1993
    Date of Patent: October 11, 1994
    Assignee: Varian Associates, Inc.
    Inventor: Terry T. Sheng