Abstract: To improve photocurrent characteristics of a molecule detecting sensor, the molecule detecting sensor is formed in the steps of: depositing a first silicon layer (12) on a R-plane sapphire substrate (11); turning the first silicon layer (12) amorphous by implanting silicon ions thereinto in the vicinity of the silicon layer-sapphire substrate interface; recrystallizing an amorphous silicon layer by heat treatment; oxidizing part of the first silicon layer (12) by introducing a recrystallized silicon layer into an oxidation furnace; removing a silicon oxide film (13) formed by an oxidation; depositing a second silicon layer (15) on a seed silicon layer (14) which is a first silicon layer left after removing the steps of forming an insulator layer (3) on a single crystal silicon layer (2) which is a laminated structure made up of the seed silicon layer (14) and the second silicon layer (15); and placing an electrolyte (4) on the insulator layer.

Abstract: In the manufacture of a substrate with a hydrophobic film used for a reference electrode of an ion sensor or the like, a hydrophobic film is formed on a substrate by irradiating a target consisting of a hydrophobic compound with a neutral atom beam and thereby effecting sputtering. The apparatus for effecting the sputtering comprises a target base disposed in a vacuum chamber, an atom beam gun for irradiating a target on the target base with a neutral beam, a substrate base and a shutter for controlling the passage of sputtered particles. A thin film that is manufactured is suitable for an ion sensor, such as an ISFET or the like or an enzyme sensor.

Abstract: A reference electrode for generating a reference potential on an ion sensor is disclosed. The reference electrode has a lamination film covering a surface of an electrically conductive substrate and formed by alternately laminating silver halide thin films and hydrophobic resin thin films.

Abstract: A reference electrode according to the present invention includes a silver layer (2) and an insulating hydrophobic material layer (5) which is formed by atomic beam sputtering and containing silver halide dispersed therein, on the surface of a conductive substrate (1).The resulting reference electrode is of a solid type, is almost free from outflow of silver halide, can be miniaturized easily, is not affected by ion concentration, provides a stable potential and has high durability.The conductive substrate (1) may be a field effect transistor having a gate insulator film and the layer (5) may be a laminate film obtained by laminating alternately a thin layer or layers of silver halide and a thin layer or layers of insulating hydrophobic material.

Abstract: A reference electrode for generating a reference potential on an ion sensor is disclosed. The reference electrode has a lamination film covering a surface of an electrically conductive substrate and formed by alternately laminating silver halide thin films and hydrophobic resin thin films.

Abstract: An electrochromic display composed of a transparent electroconductive membrane, an electrochromic membrane, an ion-exchange membrane and a counter electrode in a laminated structure. The ion-exchange membrane is a bipolar ion-exchange membrane composed of at least one cation-exchange membrane layer having cation-exchange groups and at least one anion-exchange membrane layer containing anion-exchange groups in a laminated structure. The electrochromic display has a superior response speed, contrast and resolving power as well as a long service life.