Abstract: When a cavity accommodating movable portion of an external force detecting sensor has a narrow structure, the external force detecting sensor is influenced by air damping, and therefore the cavity should have a wide structure. However, when a top surface and bottom surface of the cavity are positioned too high, the range of vertical movement of the movable portion is increased, and when an external impact force is applied to the external force detecting sensor, a movable interdigitated electrode rides on fixed interdigitated electrodes and stays there, thus the external force detecting sensor is rendered inoperable.

Abstract: A semiconductor substrate is coupled to the upper side of a base. After the semiconductor substrate is processed, a lid material is anode-coupled to the semiconductor substrate. For the anode-coupling, first, the semiconductor substrate and the lid material are anode-coupled in a spot pattern. After this, the semiconductor substrate and the lid material are wholly anode-coupled to each other. Thereafter, the laminate including the base, the semiconductor substrate, and the lid material are divided and separated into predetermined individual areas. Thus, a vacuum container having a vacuum cavity formed inside of the laminate including the base layer, the semiconductor layer, and the lid layer can be formed. The vacuum degree of the vacuum cavity of the vacuum container is considerably enhanced compared to that by a conventional process of producing a vacuum container. In addition, scattering of the vacuum degrees of the vacuum cavities can be suppressed.

Abstract: A semiconductor substrate is coupled to the upper side of a base. After the semiconductor substrate is processed, a lid material is anode-coupled to the semiconductor substrate. For the anode-coupling, first, the semiconductor substrate and the lid material are anode-coupled in a spot pattern. After this, the semiconductor substrate and the lid material are wholly anode-coupled to each other. Thereafter, the laminate including the base, the semiconductor substrate, and the lid material are divided and separated into predetermined individual areas. Thus, a vacuum container having a vacuum cavity formed inside of the laminate including the base layer, the semiconductor layer, and the lid layer can be formed. The vacuum degree of the vacuum cavity of the vacuum container is considerably enhanced compared to that by a conventional process of producing a vacuum container. In addition, scattering of the vacuum degrees of the vacuum cavities can be suppressed.

Abstract: When a cavity accommodating movable portion of an external force detecting sensor has a narrow structure, the external force detecting sensor is influenced by air damping, and therefore the cavity should have a wide structure. However, when a top surface and bottom surface of the cavity are positioned too high, the range of vertical movement of the movable portion is increased, and when an external impact force is applied to the external force detecting sensor, a movable interdigitated electrode rides on fixed interdigitated electrodes and stays there, thus the external force detecting sensor is rendered inoperable.

Abstract: A vibrator includes: a vibrating body; a driving unit for causing the vibrating body to vibrate in a predetermined vibrating direction; and a driving monitoring unit for detecting vibration displacement in a driving direction of the vibrating body. Stabilization of vibration in the driving direction of the vibrating body is achieved by applying positive feedback control to the driving unit based on the state of the vibration displacement in the driving direction of the vibrating body detected by this driving monitoring unit. The driving monitoring unit is constructed and arranged so as to be provided in a barycentric region of the vibrating body to detect the vibration displacement in the driving direction of the barycentric region of the vibrating body.