Abstract: The present invention relates to a substrate cassette that houses a plurality of horizontally oriented substrates in multiple levels in the vertical direction and in which support bars are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame formed on the back of the opposite side from the substrate insertion side.

Abstract: The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to inhibit bending of the central portion of each substrate, comprising: an upper plate made of a carbon fiber composite material; a lower plate made of a carbon fiber composite material; and an intermediate member disposed between the upper plate and the lower plate, and made of a material other than a carbon fiber composite material.

Abstract: An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.