Patents by Inventor Terumasa Sakai

Terumasa Sakai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus
    Patent number: 4711568
    Abstract: An exposure apparatus and method for irradiating a mask having a circuit pattern with light emitted from an intermittently emitting type light source so that the mask pattern is photolithographically transferred onto a semiconductor wafer, wherein the output of the intermittent-emission type light source is detected prior to the photolithographic transfer of the mask pattern onto the wafer and, in accordance with the result of such detection, the amount of exposure of the wafer to the light beam from the mask is controlled.
    Type: Grant
    Filed: March 5, 1986
    Date of Patent: December 8, 1987
    Assignee: Canon Kabushiki Kaisha
    Inventors: Makoto Torigoe, Akiyoshi Suzuki, Terumasa Sakai