Patents by Inventor Terumi Muguruma
Terumi Muguruma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6926029Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.Type: GrantFiled: December 8, 2004Date of Patent: August 9, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Kiyotaka Inoue, Terumi Muguruma, Yuichi Kuroda, Noriaki Yoshikawa
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Publication number: 20050098218Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.Type: ApplicationFiled: December 8, 2004Publication date: May 12, 2005Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kiyotaka Inoue, Terumi Muguruma, Yuichi Kuroda, Noriaki Yoshikawa
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Patent number: 6883539Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.Type: GrantFiled: September 24, 2003Date of Patent: April 26, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Kiyotaka Inoue, Terumi Muguruma, Yuichi Kuroda, Noriaki Yoshikawa
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Publication number: 20040055650Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.Type: ApplicationFiled: September 24, 2003Publication date: March 25, 2004Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kiyotaka Inoue, Terumi Muguruma, Yuichi Kuroda, Noriaki Yoshikawa
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Publication number: 20020182037Abstract: A substrate processing apparatus for providing predetermined processing to wafers brought in through the load port door comprises in the front of the load port door a load port table on which a wafer carrier accommodating a plurality of wafers is placed, and a shield plate is provided so as to surround the load port table.Type: ApplicationFiled: March 7, 2002Publication date: December 5, 2002Applicant: SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.Inventors: Shinyo Kimoto, Kenji Tokunaga, Seokhyun Kim, Terumi Muguruma, Yoshiaki Yamada, Shinichi Watanabe, Masahiro Nishi
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Patent number: 6422247Abstract: A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.Type: GrantFiled: May 21, 2001Date of Patent: July 23, 2002Assignee: Kabushiki Kaisha ToshibaInventors: Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yoshitaka Hasegawa, Yuichi Kuroda
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Publication number: 20010020480Abstract: A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.Type: ApplicationFiled: May 21, 2001Publication date: September 13, 2001Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yoshitaka Hasegawa, Yuichi Kuroda
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Patent number: 6267123Abstract: A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.Type: GrantFiled: March 9, 1999Date of Patent: July 31, 2001Assignee: Kabushiki Kaisha ToshibaInventors: Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yoshitaka Hasegawa, Yuichi Kuroda
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Patent number: 6123120Abstract: Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers, a unit for fitting the covers to pods, respectively, a unit for holding the pods with the covers, a gas supply unit for individually supplying gas into the pods through the covers, and an exhaust unit for individually discharging an atmosphere from the pods through the covers. Each pod is closed with the cover in the storage equipment, and the gas supply unit and exhaust unit periodically replace an atmosphere in each pod with inert gas or evacuate each pod, to control the storage conditions of each pod in the storage equipment.Type: GrantFiled: December 2, 1998Date of Patent: September 26, 2000Assignee: Kabushiki Kaisha ToshibaInventors: Tadashi Yotsumoto, Terumi Muguruma, Noriaki Yoshikawa, Yuichi Kuroda
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Patent number: 5294292Abstract: A plasma ashing method to prevent a generation of a resist-residue buildup is disclosed that includes a step for installation of a substrate on which a photoresist material is formed in a chamber, a step for drawing a vacuum in the chamber and keeping the chamber at a predetermined pressure, a step for filling oxygen gas in the camber and keeping the chamber at approximately 1 Torr, and a step for applying a high-frequency electric power of 0.10 [W/cm.sup.2 ] or less to the oxygen gas. A more effective range of the high-frequency electric power per area of the internal wall of the chamber is from 0.008 to 0.10 [W/cm.sup.2 ]. The most effective value of the high-frequency electric power is 0.055 [W/cm.sup.2 ].Type: GrantFiled: August 27, 1990Date of Patent: March 15, 1994Assignee: Kabushiki Kaisha ToshibaInventors: Eiji Yamashita, Terumi Muguruma