Abstract: Two piezoelectric thin films each sandwiched between a main electrode layer and an opposite electrode layer are laminated in pairs so as to form a thin film piezoelectric element. An electrode leading area has a region in which the main electrode layer partially projects from the piezoelectric thin film, and another region in which only an insulating layer is formed on a part of the opposite electrode layer. At least one of a first opening formed through the insulating layer in the former region and a second opening formed through the insulating layer in the latter region is provided. A connection wiring for connecting to the opposite electrode layer or the main electrode layer and leading to the surface layer is formed via the opening.

Abstract: The present invention provides a method for forming a resist pattern that allows a fine pattern to be formed by preventing undesirable diffraction of light in exposure. This method includes: a step of forming a resist film 2 on a surface of a base 1; a step of forming a protrusion 252 and an air-evacuating recess 251 on the resist film 2 by exposing the resist film 2 to light and developing the same; a step of bringing the resist film 2 and a photomask 31 in which a predetermined pattern is formed into close contact with each other by performing evacuation through the air-evacuating recess 251 in the state where the photomask 31 is superimposed on the resist film 2; and a step of exposing a portion of the resist film 2 that corresponds to the pattern of the photomask 31 to light, wherein the pattern of the photomask 31 is formed so as to extend from a region facing the protrusion 252 to a region facing the air-evacuating recess 251 on the resist film 2.

Abstract: A recess for deaeration is formed in the surface of a resist film by using the photolithography technique, a photomask is allowed to come into contact with projections for close contact on both sides or around the recess for deaeration, and evacuation is performed via the recess for deaeration, thereby enhancing close contact between the photomask and the projections for close contact. With the configuration, a resist pattern having an accurate recess while preventing diffraction of light is formed.

Abstract: Two piezoelectric thin films each sandwiched between a main electrode layer and an opposite electrode layer are laminated in pairs to form a thin film piezoelectric element. An electrode leading area has a region in which the main electrode layer partially projects from the piezoelectric thin film, and another region in which only an insulating layer is formed on a part of the opposite electrode layer. At least one of a first opening formed through the insulating layer in the former region and a second opening formed through the insulating layer in the latter region is provided. Formed via the opening is a connection wiring for connecting to the opposite electrode layer or the main electrode layer and leading to the surface layer.

Abstract: A recess for deaeration is formed in the surface of a resist film by using the photolithography technique, a photomask is allowed to come into contact with projections for close contact on both sides or around the recess for deaeration, and evacuation is performed via the recess for deaeration, thereby enhancing close contact between the photomask and the projections for close contact. With the configuration, a resist pattern having an accurate recess while preventing diffraction of light is formed.

Abstract: In an integrated thin film magnetic head, a write pole or inductive head I.sub.h includes first and second magnetic cores magnetically coupled to form a magnetic circuit and a coil formed between the first and second magnetic cores. An MR element read pole or MR head MR.sub.h includes first and second yokes, an MR element and a bias conductor for applying a biasing magnetic field on the MR device, and the first magnetic core or the second magnetic core constitutes the second yoke.

Abstract: A thin film magnetic head device to be equipped on a magnetic recording and reproducing system can meet a plurality of recording formats and carry out stabilized recording/reproducing without depending on the running direction of the magnetic tape. There are combined either of at least two thin film magnetic heads for recording each having on a substrate a recording transducer for recording information on a magnetic tape or two thin film magnetic heads for reproducing each having a reproducing transducer for reading out information recorded on a magnetic tape or two thin magnetic heads for recording and reproducing .in which the recording transducer and the reproducing transducer exist together. According to the running direction of the magnetic tape, only the thin film magnetic head Which is situated at the downstream side in the running direction of the magnetic tape is activated to be always in an operating condition.