Abstract: This mobile robot is provided with a robot power control unit, a mobile unit, an operation unit, and a control unit, wherein: the mobile unit has a function of moving the mobile robot; the operation unit has a function of performing a prescribed operation; the control unit performs calculation for controlling the operation of at least the mobile unit and the operation unit and outputs control commands respectively to the mobile unit and the operation unit; the robot power control unit has a housing for a detachable rechargeable battery; the detachable rechargeable battery housed in the housing supplies power to the mobile unit and the operation unit; and the prescribed operation includes battery replacement operation in which the detachable rechargeable battery housed in the housing is removed from the housing and from the outside, another detachable rechargeable battery is placed in the housing.

Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

Abstract: Provided is a module system for a robot, said module system being suitable for an autonomous robot that switches between onsite operations.

Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

Abstract: In the present invention, device information is collected while real-time performance and high-speed performance of control-related normal communication are maintained. The distributed control system has: a central processing device; a central communication device; multiple terminal communication devices each having at least one controlled device connected thereto; an information storage device; and a network having a tree structure comprising multiple communication paths between the central communication device and the terminal communication devices, between the terminal communication devices, and between the terminal communication devices and the information storage device.

Abstract: In the present invention, device information is collected while real-time performance and high-speed performance of control-related normal communication are maintained. The distributed control system has: a central processing device; a central communication device; multiple terminal communication devices each having at least one controlled device connected thereto; an information storage device; and a network having a tree structure comprising multiple communication paths between the central communication device and the terminal communication devices, between the terminal communication devices, and between the terminal communication devices and the information storage device.

Abstract: A terminal communication apparatus has a terminal communication control portion rendering an immediate communication control portion sequentially transmitting serial data to another terminal communication apparatus bitwise when receiving a packet as bitwise serial data and a normal communication control portion performing processing on the packet after accumulating the serial data until the serial data reaches a packet length when receiving the bitwise serial data switchable, performing processing with the immediate communication control portion in a case of receiving a time adjustment packet containing time adjustment data posting a timing of synchronization in the other terminal communication apparatus and performing processing with the normal communication control portion in a case of receiving a packet other than the time adjustment packet. Thus, synchronization of control object devices can be enabled without previously investigating communication delay times.

Abstract: A motion controller device and a communication method for the motion controller device are provided to reduce the large number of man-hours that are required for making communication settings and wiring design in large-scale systems. The motion controller device and communication method improve the degree of freedom for communication line connections by switching the two transmission paths on the transmitting and receiving sides of the communication ports contained within a central communication device and a terminal communication devices for full duplex communications. The motion controller device and communication also ensure the response performance required in the devices being controlled by way of the terminal communication device that autonomously and dynamically switches the communication paths according to the volume of communication data on the communication line along this type of network.

Abstract: In a distributed control system including a central communication device, terminal communication devices to which target devices to be controlled are connected, and a network including multiple communication paths connecting the central communication device and terminal communication devices, each terminal communication device includes a calculation input/output performance storage unit storing input/output performance of a calculation unit for controlling the target devices to be controlled and a control input/output performance storage unit storing the performance of the input/output control units of the target devices to be controlled, and the central communication device collects input/output performance information previously stored in these storage units, determines communication paths of the terminal communication units and a packet division method in such a manner that an amount of a communication data of a network and response performance requested of the distributed control system are satisfied, on

Abstract: A motion controller is provided which improves system responsiveness without having to raise the arithmetic capacity of a master controller or to boost the communication speed of a network. The master controller 1 uses a program analysis unit 1g to separate, from a control program designating a tolerable delay time for operating control target apparatuses, a slave use program to be executed by a slave controller in a manner not to exceed the tolerable delay time, and to create slave-to-slave communication setting information needed by the slave controller to execute the slave use program. Through slave-to-slave communication, the slave controller 2 acquires input/output information from another slave controller. The slave controller 2 also uses a slave use program execution unit 2f to execute its own slave use program.

Abstract: A network I/O system includes a central communication unit having a communication port and a plurality of terminal communication units each having an upstream communication port and a plurality of downstream ports wherein the central communication unit transmits, to the terminal communication units, routing data of the central communication unit to the terminal communication units for setting identification numbers in the terminal communication units and data of the identification number of the terminal communication units, the terminal communication units refer to the data to transmit to the downstream communication port and set the identification number in a targeted terminal communication unit, and a communication port number of the downstream communication port is appended to routing recognition data to be transmitted from the terminal communication units to the central communication unit at a time of passing through the terminal communication units, thereby recognizing a network configuration.

Abstract: In a distributed control system including a central communication device, terminal communication devices to which target devices to be controlled are connected, and a network including multiple communication paths connecting the central communication device and terminal communication devices, each terminal communication device includes a calculation input/output performance storage unit storing input/output performance of a calculation unit for controlling the target devices to be controlled and a control input/output performance storage unit storing the performance of the input/output control units of the target devices to be controlled, and the central communication device collects input/output performance information previously stored in these storage units, determines communication paths of the terminal communication units and a packet division method in such a manner that an amount of a communication data of a network and response performance requested of the distributed control system are satisfied, on

Abstract: A motion controller device and a communication method for the motion controller device are provided to reduce the large number of man-hours that are required for making communication settings and wiring design in large-scale systems. The motion controller device and communication method improve the degree of freedom for communication line connections by switching the two transmission paths on the transmitting and receiving sides of the communication ports contained within a central communication device and a terminal communication devices for full duplex communications. The motion controller device and communication also ensure the response performance required in the devices being controlled by way of the terminal communication device that autonomously and dynamically switches the communication paths according to the volume of communication data on the communication line along this type of network.

Abstract: A terminal communication apparatus has a terminal communication control portion rendering an immediate communication control portion sequentially transmitting serial data to another terminal communication apparatus bitwise when receiving a packet as bitwise serial data and a normal communication control portion performing processing on the packet after accumulating the serial data until the serial data reaches a packet length when receiving the bitwise serial data switchable, performing processing with the immediate communication control portion in a case of receiving a time adjustment packet containing time adjustment data posting a timing of synchronization in the other terminal communication apparatus and performing processing with the normal communication control portion in a case of receiving a packet other than the time adjustment packet. Thus, synchronization of control object devices can be enabled without previously investigating communication delay times.

Abstract: A motion controller is provided which improves system responsiveness without having to raise the arithmetic capacity of a master controller or to boost the communication speed of a network. The master controller 1 uses a program analysis unit 1g to separate, from a control program designating a tolerable delay time for operating control target apparatuses, a slave use program to be executed by a slave controller in a manner not to exceed the tolerable delay time, and to create slave-to-slave communication setting information needed by the slave controller to execute the slave use program. Through slave-to-slave communication, the slave controller 2 acquires input/output information from another slave controller. The slave controller 2 also uses a slave use program execution unit 2f to execute its own slave use program.

Abstract: A central communication unit 110 and a terminal communication unit 120 are provided with a priority order number storing unit 115 and fifo type storing units, and perform communication according to the priority order of data communication stored in the priority order number storing unit 115. At this time the priority order and the layout of respective devices of control objects are optimized and set through a software processing in a host computer according to the communication cycle and response performance required for the devices of control objects, thereby, the plurality of devices of control objects requiring different communication cycles and response performances can be connected on one network.

Abstract: A network I/O system includes a central communication unit having a communication port and a plurality of terminal communication units each having an upstream communication port and a plurality of downstream ports wherein the central communication unit transmits, to the terminal communication units, routing data of the central communication unit to the terminal communication units for setting identification numbers in the terminal communication units and data of the identification number of the terminal communication units, the terminal communication units refer to the data to transmit to the downstream communication port and set the identification number in a targeted terminal communication unit, and a communication port number of the downstream communication port is appended to routing recognition data to be transmitted from the terminal communication units to the central communication unit at a time of passing through the terminal communication units, thereby recognizing a network configuration.

Abstract: A network I/O system includes a central communication unit having a communication port and a plurality of terminal communication units each having an upstream communication port and a plurality of downstream ports wherein the central communication unit transmits, to the terminal communication units, routing data of the central communication unit to the terminal communication units for setting identification numbers in the terminal communication units and data of the identification number of the terminal communication units, the terminal communication units refer to the data to transmit to the downstream communication port and set the identification number in a targeted terminal communication unit, and a communication port number of the downstream communication port is appended to routing recognition data to be transmitted from the terminal communication units to the central communication unit at a time of passing through the terminal communication units, thereby recognizing a network configuration.

Abstract: A drawing apparatus which can create an exposure pattern rapidly. The drawing apparatus has a raster conversion processing module for converting vector images as wiring patterns into bitmap image data, an image cache module for temporarily storing a predetermined-size cached image supplied from the raster conversion processing module, a first compression module for compressing the cached image stored in the image cache module, a second compression module for compressing the cached image stored in the image cache module in a compression ratio differing from that of the first compression module, a comparison module for comparing data sizes of compressed data generated by the first and second compression modules and selecting one having a smaller data size, a memory access module for writing the compressed data selected by the comparison module, into a storage module, and a cache region control module for controlling a compression status of the cached image.

Abstract: A central communication unit 110 and a terminal communication unit 120 are provided with a priority order number storing unit 115 and fifo type storing units, and perform communication according to the priority order of data communication stored in the priority order number storing unit 115. At this time the priority order and the layout of respective devices of control objects are optimized and set through a software processing in a host computer according to the communication cycle and response performance required for the devices of control objects, thereby, the plurality of devices of control objects requiring different communication cycles and response performances can be connected on one network.