Abstract: A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.

Abstract: A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

Abstract: Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.

Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.

Abstract: A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

Abstract: Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.

Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

Abstract: The invention seeks to provide a thin-film coil of high space factor and of a low resistance in an easy and reliable manner. In a thin-film coil in which a first coil and a second coil each having a desired number of winding are electrically connected in series and mounted in the thin-film coil, the second coil is formed between winding portions of the first coil on substantially the same plane, and only an insulating film is interposed between the first coil and the second coil.

Abstract: The invention seeks to provide a thin-film coil of high space factor and of a low resistance in an easy and reliable manner. In a thin-film coil in which a first coil and a second coil each having a desired number of winding are electrically connected in series and mounted in the thin-film coil, the second coil is formed between winding portions of the first coil on substantially the same plane, and only an insulating film is interposed between the first coil and the second coil.

Abstract: The width W1 of the lower shield thin film 3 and the width W2 of the upper shield thin film 7 are specified so that each of these widths is larger than the width W3 of the MR element 5 and is smaller than the contact width W4.

Abstract: A magnetic head having connecting terminals that can be easily connected to terminals of a support base using an automatic wiring machine, and a method of manufacturing the magnetic head with an improved productivity.

Abstract: A magnetic head having optimum recording/reproducing characteristics and a method for producing the magnetic head. A pair of magnetic core halves 2, 3, each having a substrate 4 and a thin magnetic metal film 6 formed obliquely on it, are bonded together via a non-magnetic material C for defining a magnetic gap. A portion of the substrate faces a junction surface 8 of the magnetic core halves 2, 3. The substrate portion is arranged for facing an end face of the magnetic meta film 6 of the opposite side magnetic core half facing the junction surface 8.

Abstract: A magnetic head having optimum recording/reproducing characteristics and a method for producing the magnetic head. A pair of magnetic core halves 2, 3, each having a substrate 4 and a thin magnetic metal film 6 formed obliquely on it, are bonded together via a non-magnetic material C for defining a magnetic gap. A portion of the substrate faces a junction surface 8 of the magnetic core halves 2, 3. The substrate portion is arranged for facing an end face of the magnetic meta film 6 of the opposite side magnetic core half facing the junction surface 8.

Abstract: A magnetoresistive head includes a magnetoresistive element sandwiched between a pair of soft magnetic material-made shields to detect signal from a magnetic tape under a magnetoresistance effect, the magnetoresistive element having a magnetic sensor disposed obliquely, at a predetermined azimuth angle, to a direction perpendicular in which the magnetic tape is fed or moved; the magnetoresistive head being installed on a rotating drum to read signal on the magnetic tape by the helical scanning method. A recording/reproducing apparatus includes a rotating drum having installed thereon the magnetoresistive head as reading head and an inductive magnetic head as writing head, to write and/or read signal from the magnetic tape by the helical scanning method.

Abstract: According to a magnetic head and a method of manufacturing the same, a connecting process required when a magnetic head is attached to a head base can be implemented with ease. A pair of magnetic core half blocks (3, 4) are joined to form a magnetic core for forming a closed magnetic circuit. A thin film coil (6) is formed on the joint surface in which the magnetic core half blocks (3, 4) are joined. Terminals (7) of the thin film coil (6) are formed on the same plane of a head side surface (10a) intersecting the above-mentioned joint surface, resulting in a magnetic head (10) being constructed.