Abstract: There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to operate in a vacuum and transport a substrate in a vacuum transfer chamber and compare the sound information with a preset threshold value to detect an abnormality of the transfer. The transfer includes a gas-filled container arranged in the vacuum transfer chamber and filled with a gas and a microphone installed inside the gas-filled container.

Abstract: Described herein is a technique capable of reducing an amount of moisture in a low temperature region in a substrate processing apparatus provided with a transfer chamber. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber provided with a heater; a load lock chamber; a transfer chamber provided between the process chamber and the load lock chamber and including a first region provided adjacent to the process chamber and a second region provided more adjacent to the load lock chamber than the first region and whose temperature is lower than a temperature of the first region; a detector capable of detecting an amount of moisture in the transfer chamber; and an inert gas supplier capable of supplying an inert gas toward the second region in the transfer chamber.

Abstract: There is provided a technique capable of improving a uniformity of a substrate processing on a substrate surface. According to one aspect thereof, there is provided a substrate processing apparatus including: a substrate processing room; a plasma generation room; a gas supplier supplying a gas into the plasma generation room; a first coil surrounding the plasma generation room and to which an electric power is supplied; and a second coil surrounding the plasma generation room and to which an electric power is supplied. An axial direction of the second coil is equal to that of the first coil, a winding diameter of the second coil is different from that of the first coil, and a peak of a voltage distribution generated by supplying the electric power to the second coil does not overlap with a peak of a voltage distribution generated by the first coil.

Abstract: The present invention provides a hydrogen sensor including a concentration cell holding a solid electrolyte having proton conductivity. The solid electrolyte is mainly formed of &agr; alumina in which oxide of alkaline earth metal is doped. The hydrogen sensor can measure a hydrogen concentration of measuring objects. For example, it is possible to measure a hydrogen concentration of high temperature gas or molten metal such as copper alloy, cast iron, carbon steel, and alloy steel.

Abstract: A prefabricated reach-in refrigerator-freezer which has a floor panel, a front panel with doors, right and left side panels, a back panel and a ceiling panel supporting a refrigerating unit. All the areas where the above panels come into contact with each other are connected and sealed with removable joints to enable easy assembly and disassembly.