Abstract: A low cost power conversion device operating at a high frequency with high efficiency is realized by using semiconductor switching devices such as FETs being inexpensive and having low withstand voltages and low forward voltage drops. A second error signal obtained by comparing the voltages across two input capacitors connected between both ends of a DC input power supply is subtracted/added from/to a first error signal obtained from a voltage corresponding to a combined DC output of rectifying circuits and the voltage corresponding to a predetermined reference power. Based on the resultant signals, the voltage of a control signal supplied to an inverter circuit in which the voltage across an input capacitor is higher is increased, while the voltage of a control signal supplied to another inverter circuit in which the voltage across another input capacitor is lower is decreased, thereby balancing the voltages across the input capacitors.

Abstract: A low cost power conversion device operating at a high frequency with high efficiency is realized by using semiconductor switching devices such as FETs being inexpensive and having low withstand voltages and low forward voltage drops. A second error signal obtained by comparing the voltages across two input capacitors connected between both ends of a DC input power supply is subtracted/added from/to a first error signal obtained from a voltage corresponding to a combined DC output of rectifying circuits and the voltage corresponding to a predetermined reference power. Based on the resultant signals, the voltage of a control signal supplied to an inverter circuit in which the voltage across an input capacitor is higher is increased, while the voltage of a control signal supplied to another inverter circuit in which the voltage across another input capacitor is lower is decreased, thereby balancing the voltages across the input capacitors.

Abstract: An energy accumulating capacitor such as an excimer laser is prevented from being overcharged by stored energy in a resonance inductance device. In a resonant capacitor charging circuit, when it is forecast that an energy accumulating capacitor can be charged to a target charge voltage by the magnetic energy of a resonant inductance device after a first semiconductor switch is switched off, the first semiconductor switch is switched off, and when actually reaching the target charge voltage, a second semiconductor switch is switched on or off, in order to charge with high accuracy.

Abstract: An energy accumulating capacitor such as an excimer laser is prevented from being overcharged by stored energy in a resonance inductance device. In a resonant capacitor charging circuit, when it is forecast that an energy accumulating capacitor can be charged to a target charge voltage by the magnetic energy of a resonant inductance device after a first semiconductor switch is switched off, the first semiconductor switch is switched off, and when actually reaching the target charge voltage, a second semiconductor switch is switched on or off, in order to charge with high accuracy.