Abstract: A substrate processing apparatus comprising: a substrate process chamber having a plasma generation space where a processing gas is plasma-excited and a substrate processing space communicating with the plasma generation space; a substrate mounting table installed inside the substrate processing space and for mounting a substrate; an inductive coupling structure provided with a coil installed to be wound around an outer periphery of the plasma generation space; a substrate support table elevating part for raising and lowering the substrate mounting table; a gas supply part for supplying the processing gas to the plasma generation space; and a controller for controlling the substrate support table elevating part, based on a power value of a high-frequency power supplied to the coil, so that the substrate mounted on the substrate mounting table is positioned at a target height according to the power value and spaced apart from a lower end of the coil.

Abstract: Vinyl acetate is produced through reaction of ethylene, oxygen and acetic acid in vapor phase employing a catalyst which comprises 0.3 to 3.0 weight % of palladium metal, 0.0157 to 1.8 weight % of gold metal and 1 to 30 weight % of an alkali metal acetate, all based on the weight of the carrier or catalyst support therefor. These components are supported on said carrier or support under such conditions that (1) at least 90% by weight of each of the supported palladium and gold metals is distributed proximate the external surfaces of the carrier particles, extending to depths no greater than about 30% of the radius of each particle as measured from the external surface of each particle to the center of said particle, and (2) the proportion of gold to palladium ranges from about 5 to 60% by weight, based upon the total weight of the gold and palladium.

Abstract: A process for preparing glycol esters such as ethylene glycol diacetate which comprises contacting a monoolefin such as ethylene with an organic monocarboxylic acid such as acetic acid containing a palladous salt and either a nitrate or a nitrite.