Abstract: An electro-optical device includes a substrate, a scanning line provided between a first TFT and a second TFT, common wiring, a pixel electrode, a third relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the first TFT and the pixel electrode, a capacitance element provided between the substrate and the scanning line and overlapping the second TFT in plan view, and a second relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the capacitance element and the common wiring. A contact hole electrically coupling the pixel electrode and the third relay electrode overlaps a contact hole electrically coupling the capacitance element and the second relay electrode in plan view.

Abstract: A liquid crystal apparatus includes a substrate, a pixel electrode, common wiring, a TFT provided between the substrate and the common wiring, a scanning line provided between the substrate and the TFT along a first direction, a capacitance element provided between the substrate and the scanning line and overlapping the scanning line in plan view, and a second relay electrode electrically coupled to the common wiring and overlapping the scanning line in plan view. The second relay electrode and a first capacitance electrode serving as one electrode of the capacitance element are electrically coupled to each other through a contact hole overlapping the scanning line and the first capacitance electrode in plan view. The scanning line has a cutout portion provided between the second relay electrode and the first capacitance electrode and surrounding at least three directions of the circumference of the contact hole.

Abstract: A liquid crystal apparatus includes a substrate, a pixel electrode, common wiring provided between the substrate and the pixel electrode, a TFT, a scanning line, a capacitance element provided between the substrate and the scanning line and overlapping the scanning line in plan view, and a second relay electrode electrically coupled to the common wiring and overlapping the scanning line in plan view. A first capacitance electrode serving as one electrode of the capacitance element includes a projecting portion protruding from the scanning line in plan view. The second relay electrode includes a projecting portion overlapping the projecting portion in plan view. The second relay electrode and the first capacitance electrode of the capacitance element are electrically coupled to each other through a contact hole provided between the projecting portion and the projecting portion.

Abstract: An electro-optical device includes a substrate, a scanning line provided between a first TFT and a second TFT, common wiring, a pixel electrode, a third relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the first TFT and the pixel electrode, a capacitance element provided between the substrate and the scanning line and overlapping the second TFT in plan view, and a second relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the capacitance element and the common wiring. A contact hole electrically coupling the pixel electrode and the third relay electrode overlaps a contact hole electrically coupling the capacitance element and the second relay electrode in plan view.

Abstract: A liquid crystal apparatus includes a substrate, a pixel electrode, common wiring, a TFT provided between the substrate and the common wiring, a scanning line provided between the substrate and the TFT along a first direction, a capacitance element provided between the substrate and the scanning line and overlapping the scanning line in plan view, and a second relay electrode electrically coupled to the common wiring and overlapping the scanning line in plan view. The second relay electrode and a first capacitance electrode serving as one electrode of the capacitance element are electrically coupled to each other through a contact hole overlapping the scanning line and the first capacitance electrode in plan view. The scanning line has a cutout portion provided between the second relay electrode and the first capacitance electrode and surrounding at least three directions of the circumference of the contact hole.

Abstract: A method for chemical-mechanical polishing of a layer that is deposited on a surface of an integrated circuit substrate is described. The method includes: (1) immobilizing the integrated circuit substrate using a substrate holder such that the integrated circuit substrate surface is positioned against a surface of a polishing pad, which is mounted on a supporting surface; (2) a first stage of polishing the substrate surface including maintaining a predetermined difference between the rotational velocity of the polishing pad and the rotational velocity of the substrate holder allowing an endpoint of the chemical-mechanical polishing process of the layer to be detected; and (3) a second stage of polishing the substrate such that the rotational velocity of the polishing pad and the rotational velocity of the substrate holder are substantially the same to produce a substantially planar substrate surface.