Patents by Inventor Tetsuhiro Fukao
Tetsuhiro Fukao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230273241Abstract: A semiconductor laser device (2) is placed on a first heating-cooling device (1). A probe holder (4) is attached on a second heating-cooling device (3), A measurement probe (8) is fixed to a distal end of the probe holder (4). A fine movement table (9) moves the second heating-cooling device (3) and the probe holder (4) so that a distal end of the measurement probe (8) contacts the semiconductor laser device (2). An inspection apparatus (10) inputs an inspection signal to the semiconductor laser device (2) through the measurement probe (8).Type: ApplicationFiled: December 3, 2020Publication date: August 31, 2023Applicant: Mitsubishi Electric CorporationInventors: Yohei MIKAMI, Tetsuhiro FUKAO
-
Publication number: 20230143906Abstract: A semiconductor laser device (2) is placed on a first heating-cooling device (1). A probe holder (4) is attached on a second heating-cooling device (3). A measurement probe (8) is fixed to a distal end of the probe holder (4). A fine movement table (9) moves the second heating-cooling device (3) and the probe holder (4) so that a distal end of the measurement probe (8) contacts the semiconductor laser device (2). An inspection apparatus (10) inputs an inspection signal to the semiconductor laser device (2) through the measurement probe (8).Type: ApplicationFiled: January 5, 2023Publication date: May 11, 2023Applicant: Mitsubishi Electric CorporationInventors: Yohei MIKAMI, Tetsuhiro FUKAO
-
Publication number: 20230131641Abstract: An electronic device inspection apparatus of the present application comprises an inspection table for positioning and holding an electrode disposed on a semiconductor device , a contact element that is formed of a shape memory alloy in a long and thin plate shape and has a base part fixed to the inspection table and a variable part formed in a shape of a spiral at a first temperature and being developed from the spiral at a second temperature; and a measurement circuitry for measuring the semiconductor device by conducting a current to flow into the electrode via the contact element. The axis of the spiral of the variable part is parallel to the electrode face of the positioned electrode and a contact region is formed along a longitudinal direction between the variable part and the positioned electrode at the second temperature.Type: ApplicationFiled: May 13, 2020Publication date: April 27, 2023Applicant: Mitsubishi Electric CorporationInventors: Kazuya ITOSE, Tetsuhiro FUKAO, Motoyoshi KOYANAGI, Yohei MIKAMI, Masafumi TAKEDA, Yasuhiro YAMAUCHI
-
Patent number: 9563065Abstract: An optical module includes: a pedestal; a glass optical multiplexer/demultiplexer fixed onto the pedestal via a UV adhesive; and a metal block which is smaller than the glass optical multiplexer/demultiplexer and is fixed to a top surface of the glass optical multiplexer/demultiplexer.Type: GrantFiled: February 12, 2016Date of Patent: February 7, 2017Assignee: Mitsubishi Electric CorporationInventors: Nobuyuki Yasui, Koichi Nakamura, Tatsuo Hatta, Tetsuhiro Fukao
-
Publication number: 20160377880Abstract: An optical module includes: a pedestal; a glass optical multiplexer/demultiplexer fixed onto the pedestal via a UV adhesive; and a metal block which is smaller than the glass optical multiplexer/demultiplexer and is fixed to a top surface of the glass optical multiplexer/demultiplexer.Type: ApplicationFiled: February 12, 2016Publication date: December 29, 2016Applicant: Mitsubishi Electric CorporationInventors: Nobuyuki YASUI, Koichi NAKAMURA, Tatsuo HATTA, Tetsuhiro FUKAO
-
Patent number: 9484708Abstract: A laser module includes a light source device having a first amplifier that outputs first output light, and a second amplifier that outputs second output light, a first drive circuit that supplies the first amplifier with a first drive current, a second drive circuit that supplies the second amplifier with a second drive current. A dither signal is superimposed on one of two drive currents to respectively grasp the characteristics of the two amplifiers.Type: GrantFiled: October 19, 2015Date of Patent: November 1, 2016Assignee: Mitsubishi Electric CorporationInventors: Satoshi Kajiya, Tetsuhiro Fukao
-
Publication number: 20160204568Abstract: A laser module includes a light source device having a first amplifier that outputs first output light, and a second amplifier that outputs second output light, a first drive circuit that supplies the first amplifier with a first drive current, a second drive circuit that supplies the second amplifier with a second drive current. A dither signal is superimposed on one of two drive currents to respectively grasp the characteristics of the two amplifiers.Type: ApplicationFiled: October 19, 2015Publication date: July 14, 2016Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Satoshi KAJIYA, Tetsuhiro FUKAO
-
Patent number: 8385750Abstract: An optical transceiver includes an optical transmitter. The optical transmitter varies the wavelength of its output beam in accordance with the setting of a digital to analog converter. Two split beams emerging respectively from beam splitters are introduced into a photodetector and a wavelength filter, respectively. A quotient is calculated by dividing the digital value output from an analog to digital converter (ADC) by the digital value output from another ADC. A memory address m is then determined based on this quotient without making any calculation for compensating for the imperfect characteristics of the wavelength filter. A wavelength notification value is then selected from a wavelength notification table based on the determined memory address m, and sent to the system host.Type: GrantFiled: May 12, 2009Date of Patent: February 26, 2013Assignee: Mitsubishi Electric CorporationInventors: Tetsuhiro Fukao, Harufusa Kondo, Kenichi Uto
-
Patent number: 8184985Abstract: A control circuit for an optical transmitter/receiver that transmits/receives an optical signal, comprises: a memory having a digital value storage area and an area that stores limit values; a register; an analog/digital conversion circuit that receives analog signals indicating operating parameters of the optical transmitter/receiver, converts the analog signals to respective digital values, and stores the digital values in the memory; a comparison logical circuit that compares the digital values with the limit values, generates flag values, and stores the flag values in the register; and an outside interface that allows an outside host apparatus to access the memory and the register to read the flag values and monitor an operating condition of the optical transmitter/receiver from outside.Type: GrantFiled: September 8, 2008Date of Patent: May 22, 2012Assignee: Mitsubishi Electric CorporationInventors: Harufusa Kondo, Tetsuhiro Fukao, Mutsumi Nakamaru
-
Publication number: 20100150578Abstract: An optical transceiver includes an optical transmitter. The optical transmitter varies the wavelength of its output beam in accordance with the setting of a digital to analog converter. Two split beams emerging respectively from beam splitters are introduced into a photodetector and a wavelength filter, respectively. A quotient is calculated by dividing the digital value output from an analog to digital converter (ADC) by the digital value output from another ADC. A memory address m is then determined based on this quotient without making any calculation for compensating for the imperfect characteristics of the wavelength filter. A wavelength notification value is then selected from a wavelength notification table based on the determined memory address m, and sent to the system host.Type: ApplicationFiled: May 12, 2009Publication date: June 17, 2010Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Tetsuhiro Fukao, Harufusa Kondo, Kenichi Uto
-
Publication number: 20090279885Abstract: A control circuit for an optical transmitter/receiver that transmits/receives an optical signal, comprises: a memory having a digital value storage area and an area that stores limit values; a register; an analog/digital conversion circuit that receives analog signals indicating operating parameters of the optical transmitter/receiver, converts the analog signals to respective digital values, and stores the digital values in the memory; a comparison logical circuit that compares the digital values with the limit values, generates flag values, and stores the flag values in the register; and an outside interface that allows an outside host apparatus to access the memory and the register to read the flag values and monitor an operating condition of the optical transmitter/receiver from outside.Type: ApplicationFiled: September 8, 2008Publication date: November 12, 2009Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Harufusa Kondo, Tetsuhiro Fukao, Mutsumi Nakamaru
-
Publication number: 20030226070Abstract: A clock extraction circuit includes an edge detection unit for detecting a phase at which a trailing edge or a leading edge of input data is coincided with each other, and a phase judgement unit for comparing an edge position of the detected input data and a position of an input clock and for putting a weight, wherein the weight is put so that a shifting amount of the input clock is varied depending on a difference between the edge position of the input data and the position of the input clock.Type: ApplicationFiled: November 15, 2002Publication date: December 4, 2003Applicant: MITSUBISHI DENKI KABUSHIKI KAISHAInventors: Tetsuhiro Fukao, Harufusa Kondou, Masahiko Ishiwaki, Shigeki Kohama
-
Patent number: 6346482Abstract: There is described formation of a contact hole without involvement of damage to an etching stopper film and deterioration of electric characteristics, achieved by means of a self-alignment method. An interlayer oxide film is etched through an opening of a resist mask, and by means of plasma etching through use of a processing gas comprising a mixture of a rare gas and a CF-based gas, thereby tapering a shoulder of the silicon nitride film. Alternatively, a silicon oxide film and a silicon nitride film are continually etched through an opening of the resist mask, by means of plasma etching through use of a CH2F2 gas added to a mixed gas including a rare gas and a C4F8 gas.Type: GrantFiled: October 21, 1998Date of Patent: February 12, 2002Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Junko Matsumoto, Shigenori Sakamori, Akemi Teratani, Yoshihiro Kusumi, Tetsuhiro Fukao, Kazuyuki Ohmi, Kanji Tabaru, Nobuaki Yamanaka
-
Publication number: 20010041450Abstract: There is described formation of a contact hole without involvement of damage to an etching stopper film and deterioration of electric characteristics, achieved by means of a self-alignment method. An interlayer oxide film is etched through an opening of a resist mask, and by means of plasma etching through use of a processing gas comprising a mixture of a rare gas and a CF-based gas, thereby tapering a shoulder of the silicon nitride film. Alternatively, a silicon oxide film and a silicon nitride film are continually etched through an opening of the resist mask, by means of plasma etching through use of a CH2F2 gas added to a mixed gas including a rare gas and a C4F8 gas.Type: ApplicationFiled: October 21, 1998Publication date: November 15, 2001Inventors: JUNKO MATSUMOTO, SHIGENORI SAKAMORI, AKEMI TERATANI, YOSHIHIRO KUSUMI, TETSUHIRO FUKAO, KAZUYUKI OHMI, KENJI TABARU, NOBUAKI YAMANAKA
-
Patent number: 6156639Abstract: Provided are a method for manufacturing contact structure to prevent, in the wire of a borderless structure, erosion in the contact area between the wire and a conductor. An interlayer insulating film (300) having a wire burying hole is formed and a conductor (400) is buried in the hole. Then, a wire layer (500) covering the hole is formed on the interlayer insulating film (300). The wire layer (500) is made so as to have a borderless structure by using a resist (540) as a mask. A barrier metal layer (510) suppresses erosion in the contact area between the conductor (400) and the wire layer (500).Type: GrantFiled: July 16, 1998Date of Patent: December 5, 2000Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tetsuhiro Fukao, Yoshihiro Kusumi, Hiroshi Miyatake, Nobuo Fujiwara, Shigenori Sakamori, Satoshi Iida