Abstract: An imprint apparatus that cures an imprint material on a substrate in a state where a mold is in contact with the imprint material includes a substrate holding unit having a plurality of holding regions that holds the substrate, and a control unit configured to control a pressure in each of the holding regions independently, wherein the control unit controls the pressure based on at least one of shape information and distortion information of the substrate, at least when the imprint material is cured.

Abstract: The present invention provides a simulation method of predicting a behavior of a composition in processing of bringing the composition arranged on a first member into contact with a second member and forming a film of the composition on the first member, comprising: predicting the behavior of the composition in the processing; calculating a distribution of distortion that occurs in at least one of the first member and the second member in the processing; and displaying the distribution of distortion calculated in the calculating, wherein in the displaying, in a case where at least one piece of input information is selected from a plurality of pieces of input information used to predict the behavior of the composition, the at least one piece of input information is displayed to be superimposed as a two-dimensional image on the distribution of distortion.

Abstract: An imprint method of performing an imprint process for a shot region of a substrate using a mold is provided. The substrate includes a valid region where a chip is to be formed, and an invalid region outside the valid region where no chip is to be formed, and the invalid region is a region formed by etching an outer region outside the valid region. The method includes deciding, based on a height difference between the valid region and the invalid region, an imprint condition for a partial shot region defined by an outer edge of the valid region, and performing the imprint process for the partial shot region in accordance with the decided imprint condition.

Abstract: An imprint apparatus that cures an imprint material on a substrate in a state where a mold is in contact with the imprint material includes a substrate holding unit having a plurality of holding regions that holds the substrate, and a control unit configured to control a pressure in each of the holding regions independently, wherein the control unit controls the pressure based on at least one of shape information and distortion information of the substrate, at least when the imprint material is cured.

Abstract: The present invention provides an imprint method of forming a pattern of an imprint material on a substrate by using a mold, the method including obtaining, before bringing the mold and the imprint material into contact with each other, a correction parameter for correcting deformation of a pattern of the mold caused by bringing the mold and the imprint material on the substrate into contact with each other, and reducing the deformation of the pattern of the mold by moving at least one of the mold and the substrate by a moving unit configured to relatively move the mold and the substrate in a direction parallel to a surface of the substrate in accordance with the correction parameter in a state in which the mold and the imprint material on the substrate are in contact with each other.

Abstract: The present invention provides an imprint apparatus including an amplifier configured to amplify a signal of displacement between a mold and a substrate, and a control unit configured to perform alignment between the mold and the substrate based on the amplified signal, wherein the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction, and in the first operation, the control unit sets the gain of the amplifier to a first gain and changes the gain of the amplifier from the first gain to a second gain.

Abstract: The present invention provides a lithography apparatus which performs a process of forming a pattern on a substrate, the apparatus comprising a processing device configured to perform the process, an actuator configured to exert an action to the processing device, a detector configured to detect vibrations of a support for supporting the processing device, and a controller configured to control the actuator, wherein the controller is configured to perform an estimation of vibration transferred from the processing device to the detector, and control the actuator based on vibration obtained by the estimation and vibration detected by the detector.

Abstract: The present invention provides an imprint apparatus which forms an imprint material on a substrate using a mold, comprising a driving unit driving at least one of the mold and the substrate, a measurement unit measuring a position deviation amount between the mold and the substrate, and a control unit controlling alignment between the mold and the substrate based on the position deviation amount, wherein in a first period from a start of contact between the mold and the imprint material until a distance between the mold and the substrate falls within a target range, and a second period in which the distance is maintained, the control unit obtains a command value for controlling the driving unit and controls the driving unit such that a amplification factor of the command value in the second period is larger than that in the first period.

Abstract: The present invention provides a lithography apparatus which performs a process of forming a pattern on a substrate, the apparatus comprising a processing device configured to perform the process, an actuator configured to exert an action to the processing device, a detector configured to detect vibrations of a support for supporting the processing device, and a controller configured to control the actuator, wherein the controller is configured to perform an estimation of vibration transferred from the processing device to the detector, and control the actuator based on vibration obtained by the estimation and vibration detected by the detector.

Abstract: The present invention provides an imprint apparatus including an amplifier configured to amplify a signal of displacement between a mold and a substrate, and a control unit configured to perform alignment between the mold and the substrate based on the amplified signal, wherein the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction, and in the first operation, the control unit sets the gain of the amplifier to a first gain and changes the gain of the amplifier from the first gain to a second gain.

Abstract: The present invention provides an imprint apparatus which forms an imprint material on a substrate using a mold, comprising a driving unit driving at least one of the mold and the substrate, a measurement unit measuring a position deviation amount between the mold and the substrate, and a control unit controlling alignment between the mold and the substrate based on the position deviation amount, wherein in a first period from a start of contact between the mold and the imprint material until a distance between the mold and the substrate falls within a target range, and a second period in which the distance is maintained, the control unit obtains a command value for controlling the driving unit and controls the driving unit such that a amplification factor of the command value in the second period is larger than that in the first period.

Abstract: At least three processing machines are positioned on a supporting structure including a plurality of beams spaced apart from each other. The at least three processing machines include a first processing machine, a second processing machine supported by at least one of beams which support the first processing machine, and a third processing machine supported by beams different from all the beams which support the first processing machine. A distance between the first processing machine and the second processing machine, at which an amount of vibration transferred from the first processing machine to the second processing machine becomes smaller than a predetermined amount, is determined, thereby positioning the first processing machine and the second processing machine with a distance not less than the determined distance.

Abstract: The present invention discloses a three-dimensional structure of bovine rhodopsin.

Abstract: In an air conditioning system of the type having air volume to each room controlled by individual dampers the improvement comprising a damper control unit for, on a trial mode, gradually changing the opening angle of each damper while the other dampers are kept fully closed; air volume measurement unit for detecting the air volume from a blower to measure the actual air volume; pressure difference measurement unit for detecting a difference in pressure between the outlet air and the inlet air of an indoor heat exchanger unit to measure an air feeding pressure difference with respect to an actual duct system; air volume calculation unit for finding the relationship among the air volume passing through the respective dampers, the opening angles of the respective dampers and the air feeding pressure difference, based on outputs from the pressure difference measurement unit, the air volume measurement unit and the damper control unit, to find air feeding resistance in the respective ducts.

Abstract: A control device for an air conditioner operable in the heating and cooling operation mode is disclosed, which device comprises a "too hot" and a "too cold" switch which is operated by the user when he feels that it is too hot or too cold in the room conditioned by the air conditioner. When a first operation of one of these switches by the user takes place, a mode selector automatically selects the operation mode of the air conditioner, and the control of the air conditioner is started immediately. The setting or target temperature is automatically renewed every time a further operation of one of the switches is made, so that the target temperature may be adjusted to the individual preference of the user. The fan speed of the air conditioner may also be modified according to the frequency of inputs through the switches.

Abstract: In an air flow control device for an air conditioner including a heat exchanger arranged so as to face an inlet port, and upper and lower air-blowing fans disposed in upper and lower outlet ports, respectively, wherein air sucked through the inlet port and the heat exchanger is directed to the fans, there are further provided input producing means for outputting a condition required for the outlet air from the outlet ports and phenomenon information on the outlet air, upper and lower fan operation mode determining means for determining the operation modes depending on the output signals from the input producing means, upper and lower fan operation mode control means for controlling the operation of both fans at the operation mode according to the commands from the operation mode determining means, and control means for optimizing the outlet air to a user.

Abstract: An air conditioning device comprises a refrigerant compression cycle having an electrically driven compressor, an electric motor for driving the compressor, frequency changing means for changing the frequency of a.c. power to be applied to the motor, an outlet port for blowing off conditioned air, flowing direction changing means for changing the flowing direction of the conditioned air from the outlet port, a switch which is actuated by a user when he desires to allow the conditioned air to hit himself directly, and control means for controlling the frequency changing means and the flowing direction changing means, wherein when the switch is actuated during room cooling operation, the control means outputs to the flowing direction changing means a signal for directing the conditioned air from the outlet port in a downward flowing direction.

Abstract: An air conditioner capable of performing air conditioning in a room regardless of installation condition of an indoor unit thereof and the air blow condition, that is, a blow power of a heated or cooled air blow. The air conditioner comprises: means for setting an installation condition of an indoor unit of said air conditioner; means for setting a condition of an air blow produced from said indoor unit; and means for controlling a standard condition in the air blow condition set provisionally by said air blow condition setting means after taking the installation condition set by said installation condition setting means into account to obtain uniform room temperature distribution.

Abstract: An air flow control device for an air conditioner increases the revolution of a fan motor to the revolution wherein the short cycle does not occur, or change the direction of an air directing plate to a preset angle wherein the short cycle does not occur when information corresponding to the short cycle is detected based on the air flowing direction from the outlet port or an intake air temperature. As a result, the short cycle can be prevented, and effective heat exchanger and effective air conditioning wherein temperature distribution in a room to be air-conditioned is not deteriotated are obtained.

Abstract: In the air conditioning control apparatus of the present invention, the frequency determining means determines not only an operation frequency for the compressor depending on the load determined based on the detected room temperature and the set room temperature, but also an upper limit for the compressor operation frequency based on the air flow rate of the outlet air from the upper and lower outlet ports of the indoor unit and the successive operation time of the compressor. As a result, even if the compressor carriers out cooling operation under too great of a load, the temperature of the air blown off from the upper outlet port of the indoor unit is prevented from dropping down to less than a certain value, thereby eliminating economically the problem wherein dew is produced on the outer surface of the ceiling plate and so on.