Abstract: The present invention provides a calculation method of calculating a shape of a surface to be measured, including a step of, based on an inclination angle of the surface in a scan direction of a probe, determining a first correction parameter used to correct a measurement error caused by scanning the probe in the first direction and a second correction parameter used to correct a measurement error caused by scanning the probe in the second direction.

Abstract: The present invention provides a calculation method of calculating a shape of a measurement target surface, including a step of obtaining first corrected shape data by correcting first shape measurement data by using a first correction parameter for correcting a measurement error caused by scanning a probe in a first direction, obtaining second corrected shape data by correcting second shape measurement data by using a second correction parameter for correcting a measurement error caused by scanning the probe in a second direction, and generating first whole shape data representing a shape of the whole measurement target surface by synthesizing the first corrected shape data and the second corrected shape data.

Abstract: The present invention provides a measurement apparatus for measuring a shape of a surface of an object, including a probe configured to be scanned on the surface of the object, a plurality of reference members configured to be arranged in a scanning direction of the probe, a plurality of detection units configured to be provided at different positions of the probe in the scanning direction and each configured to detect a distance from a reference member which has been selected from the plurality of reference members in accordance with a position of the probe in the scanning direction, and a processing unit configured to obtain shape information of the surface of the object by obtaining position information of the probe based on at least one of detection results of the plurality of detection units while scanning the probe.

Abstract: The present invention provides a measurement apparatus for measuring a shape of a surface of an object, including a probe configured to be scanned on the surface of the object, a plurality of reference members configured to be arranged in a scanning direction of the probe, a plurality of detection units configured to be provided at different positions of the probe in the scanning direction and each configured to detect a distance from a reference member which has been selected from the plurality of reference members in accordance with a position of the probe in the scanning direction, and a processing unit configured to obtain shape information of the surface of the object by obtaining position information of the probe based on at least one of detection results of the plurality of detection units while scanning the probe.

Abstract: The present invention provides a calculation method of calculating a shape of a surface to be measured, including a step of, based on an inclination angle of the surface in a scan direction of a probe, determining a first correction parameter used to correct a measurement error caused by scanning the probe in the first direction and a second correction parameter used to correct a measurement error caused by scanning the probe in the second direction.

Abstract: The present invention provides a calculation method of calculating a shape of a measurement target surface, including a step of obtaining first corrected shape data by correcting first shape measurement data by using a first correction parameter for correcting a measurement error caused by scanning a probe in a first direction, obtaining second corrected shape data by correcting second shape measurement data by using a second correction parameter for correcting a measurement error caused by scanning the probe in a second direction, and generating first whole shape data representing a shape of the whole measurement target surface by synthesizing the first corrected shape data and the second corrected shape data.

Abstract: A shape calculation apparatus obtains measurement data of a first shape of a first partial region on a surface to be measured, and obtains measurement data of a second shape of a second partial region partially overlapping the first partial region on the surface to be measured. The apparatus determines a first shape correction parameter and a second correction parameter so that the value of an evaluation function for evaluating shape data obtained by correcting the measurement data of the first and second shapes by the first shape correction parameter and the second correction parameter falls within a tolerance range. The apparatus generates shape data of an entire region including the first and second partial regions by respectively correcting the measurement data of the first and second shapes using the first shape correction parameter and the second correction parameter, and combining the corrected shape data.

Abstract: A holding apparatus includes a structure and configured to hold an object so that a distance from a reference point of the structure to a reference point of the object in a direction along a reference axis is kept at a constant value. The holding apparatus further includes a plurality of holding members, each supported by the structure, including an inclined surface that is inclined relative to a plane orthogonal to the reference axis, and configured to hold the object via the inclined surface. The inclined surfaces are inclined so that the distance falls within a tolerance even if temperature of the object and the plurality of holding members change.

Abstract: A surface profile measuring apparatus includes a first image pickup device that obtains an interference pattern, an optical system that guides a measuring beam and a reference beam to the first image pickup device, a second image pickup device with which a distribution of light quantity of a beam from a light source traveling thereto avoiding the optical system is measured, and an arithmetic unit that calculates a profile of a target surface from the interference pattern. A distribution of light quantity of a beam from the light source transmitted through the optical system is measured with the first image pickup device. The profile of the target surface calculated by the arithmetic unit is corrected on the basis of the distributions of light quantity measured with the first and second image pickup devices.

Abstract: The present invention provides a measurement apparatus including a reflector configured to reflect a light traveling from an optical system, a detector configured to detect a light incident thereon via the reflector and a measurement optical system including one of a reference surface and a wavefront conversion element, and a load application device configured to apply a load to the reflector in an application direction perpendicular to the optical axis, the load application device applying a compression load to a first portion of the reflector below the optical axis, at a magnitude corresponding to an angle and a position of the first portion, in the application direction thereat, and applying a tension load to a second portion of the reflector above the optical axis, at a magnitude corresponding to an angle and a position of the second portion, in the application direction thereat.

Abstract: The present invention provides a reference standard used to calibrate measurement data of a measuring device for measuring the shape of a measurement surface utilizing interference between light from the measurement surface and light from the reference surface. A measurement surface of the reference standard has at least one protruding mark and one recessed mark, and an integrated value of the dimension of the protruding mark in the direction normal to the measurement surface of the reference standard, on the circumference of an assumed circle on the measurement surface centered at a point on an optical axis of the reference standard, is equal to an integrated value of the dimension of the recessed mark in the direction normal to the measurement surface of the reference standard on the circumference of the assumed circle.

Abstract: The present invention provides a holding apparatus including a structure and configured to hold an object so that a distance from a reference point of the structure to a reference point of the object in a direction along a reference axis is kept at a constant value, the holding apparatus including a plurality of holding members, each being supported by the structure, including an inclined surface that is inclined relative to a plane orthogonal to the reference axis, and being configured to hold the object via the inclined surface, wherein the inclined surfaces are inclined so that the distance falls within a tolerance even if temperature of the object and the plurality of holding members change.

Abstract: A surface profile measuring apparatus includes a first image pickup device that obtains an interference pattern, an optical system that guides a measuring beam and a reference beam to the first image pickup device, a second image pickup device with which a distribution of light quantity of a beam from a light source traveling thereto avoiding the optical system is measured, and an arithmetic unit that calculates a profile of a target surface from the interference pattern. A distribution of light quantity of a beam from the light source transmitted through the optical system is measured with the first image pickup device. The profile of the target surface calculated by the arithmetic unit is corrected on the basis of the distributions of light quantity measured with the first and second image pickup devices.

Abstract: The present invention provides a measurement apparatus including a reflector configured to reflect a light traveling from an optical system, a detector configured to detect a light incident thereon via the reflector and a measurement optical system including one of a reference surface and a wavefront conversion element, and a load application device configured to apply a load to the reflector in an application direction perpendicular to the optical axis, the load application device applying a compression load to a first portion of the reflector below the optical axis, at a magnitude corresponding to an angle and a position of the first portion, in the application direction thereat, and applying a tension load to a second portion of the reflector above the optical axis, at a magnitude corresponding to an angle and a position of the second portion, in the application direction thereat.

Abstract: The present invention provides a reference standard used to calibrate measurement data of a measuring device for measuring the shape of a measurement surface utilizing interference between light from the measurement surface and light from the reference surface. A measurement surface of the reference standard has at least one protruding mark and one recessed mark, and an integrated value of the dimension of the protruding mark in the direction normal to the measurement surface of the reference standard, on the circumference of an assumed circle on the measurement surface centered at a point on an optical axis of the reference standard, is equal to an integrated value of the dimension of the recessed mark in the direction normal to the measurement surface of the reference standard on the circumference of the assumed circle.