Patents by Inventor Tetsuma Ikegami
Tetsuma Ikegami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20060144714Abstract: A method and apparatus plate a substrate to form wiring by efficiently filling a fine recess formed in a semiconductor substrate with plating metal without a void or contamination. The plating of the substrate to fill a wiring recess formed in the semiconductor substrate with plating metal includes performing an electroless plating process of forming an initial layer on the substrate, and performing an electrolytic plating process of filling the wiring recess with the plating metal, while the initial layer serves as a feeding layer.Type: ApplicationFiled: February 24, 2006Publication date: July 6, 2006Inventors: Akihisa Hongo, Naoaki Ogure, Hiroaki Inous, Satoshi Sendai, Tetsuma Ikegami, Koji Mishima, Shuichi Okuyama, Mizuki Nagai, Ryoichi Kimizuka, Megumi Maruyama
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Patent number: 7033463Abstract: A method and apparatus plate a substrate to form wiring by efficiently filling a fine recess formed in a semiconductor substrate with plating metal without a void or contamination. The plating of the substrate to fill a wiring recess formed in the semiconductor substrate with plating metal includes performing an electroless plating process of forming an initial layer on the substrate, and performing an electrolytic plating process of filling the wiring recess with the plating metal, while the initial layer serves as a feeding layer.Type: GrantFiled: August 11, 1999Date of Patent: April 25, 2006Assignee: Ebara CorporationInventors: Akihisa Hongo, Naoaki Ogure, Hiroaki Inoue, Satoshi Sendai, Tetsuma Ikegami, Koji Mishima, Shuichi Okuyama, Mizuki Nagai, Ryoichi Kimizuka, Megumi Maruyama
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Patent number: 6953317Abstract: A very safe and reliable turbo-molecular pump has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause a loss of vacuum in a vacuum processing system. The turbo-molecular pump has a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section formed by the stator and the rotor, and a constriction releasing structure for releasing the constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.Type: GrantFiled: October 31, 2001Date of Patent: October 11, 2005Assignee: Ebara CorporationInventors: Tetsuma Ikegami, Matsutaro Miyamoto, Hiroyuki Kawasaki
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Patent number: 6926493Abstract: A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to any damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump includes a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion.Type: GrantFiled: December 28, 1999Date of Patent: August 9, 2005Assignee: Ebara CorporationInventors: Matsutaro Miyamoto, Hiroaki Ogamino, Tetsuma Ikegami, Hiroyuki Kawasaki
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Publication number: 20020028132Abstract: A turbo-molecular pump of high safety and reliability has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump comprises a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section comprised by the stator and the rotor, and a constriction releasing structure for releasing constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.Type: ApplicationFiled: October 31, 2001Publication date: March 7, 2002Applicant: EBARA CORPORATIONInventors: Tetsuma Ikegami, Matsutaro Miyamoto, Hiroyuki Kawasaki
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Patent number: 6332752Abstract: A turbo-molecular pump of high safety and reliability has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump comprises a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section comprised by the stator and the rotor, and a constriction releasing structure for releasing constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.Type: GrantFiled: June 25, 1998Date of Patent: December 25, 2001Assignee: Ebara CorporationInventors: Tetsuma Ikegami, Matsutaro Miyamoto, Hiroyuki Kawasaki
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Publication number: 20010016160Abstract: A turbo-molecular pump of high safety and reliability has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump comprises a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section comprised by the stator and the rotor, and a constriction releasing structure for releasing constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.Type: ApplicationFiled: June 25, 1998Publication date: August 23, 2001Applicant: EBARA CORPORATIONInventors: TETSUMA IKEGAMI, MATSUTARO MIYAMOTO, HIROYUKI KAWASAKI
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Patent number: 6092994Abstract: A screw pump includes a casing having inlet and outlet ports and a pump rotor rotatably mounted in the casing and having screw threads communicating with said inlet and outlet ports. The pump rotor is rotated by a reversible speed-controllable motor, typically a DC brushless motor, mounted in the casing to deliver a liquid such as a chemical solution from the inlet port through a liquid passage defined by the screw threads to the outlet port.Type: GrantFiled: January 28, 1998Date of Patent: July 25, 2000Assignees: Ebara Corporation, Ebara Densan Ltd.Inventors: Shigekazu Yamamoto, Tetsuma Ikegami, Hiroshi Sobukawa, Shun-ichi Aiyoshizawa, Toshiharu Nakazawa, Yoshinori Ojima
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Patent number: 5746790Abstract: A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.Type: GrantFiled: August 13, 1996Date of Patent: May 5, 1998Assignee: Ebara CorporationInventors: Yasuhiro Niimura, Tetsuma Ikegami, Naoya Hanafusa, Masaru Nakaniwa