Abstract: A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for connecting together the base section and the workpiece vacuum chuck section. These sections form an integral structure. The base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism. The workpiece vacuum chuck section has a workpiece vacuum chuck surface and a negative-pressure chamber, which opens at the workpiece vacuum chuck surface via a suction hole. The follower mechanism section has a structure that is easily elastically deformable, and is appropriately deformed in a three-dimensional space so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.

Abstract: A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for connecting together the base section and the workpiece vacuum chuck section. These sections form an integral structure. The base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism. The workpiece vacuum chuck section has a workpiece vacuum chuck surface and a negative-pressure chamber, which opens at the workpiece vacuum chuck surface via a suction hole. The follower mechanism section has a structure that is easily elastically deformable, and is appropriately deformed in a three-dimensional space so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.

Abstract: A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.

Abstract: A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.

Abstract: The present invention provides a substrate aligning system which prevents particles or the like from attaching to a substrate such as a wafer used in the semiconductor manufacturing process, and adjusts the orientation of the substrate accurately within a short period of time. According to a substrate aligning system (A) as a preferred embodiment of the present invention, a plurality of rollers (220) push the peripheral portion of a wafer (W) from different directions to align the center of the wafer. While the center of the wafer is kept aligned by the rollers (220), the contacting portion (211) of a contacting member (210) contacts a chip (Wa) of the wafer (W). The contacting member (210) is then moved arcuately to rotate the wafer (W), thus adjusting the orientation of the wafer.

Abstract: The present invention provides a substrate aligning system which prevents particles or the like from attaching to a substrate such as a wafer used in the semiconductor manufacturing process, and adjusts the orientation of the substrate accurately within a short period of time. According to a substrate aligning system (A) as a preferred embodiment of the present invention, a plurality of rollers (220) push the peripheral portion of a wafer (W) from different directions to align the center of the wafer. While the center of the wafer is kept aligned by the rollers (220), the contacting portion (211) of an contacting member (210) contacts a chip (Wa) of the wafer (W). The contacting member (210) is then moved arcuately to rotate the wafer (W), thus adjusting the orientation of the wafer.

Abstract: A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a mechanism for releasably holding the FOUP door; a port plate including an opening closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; a sensor horizontal-movement mechanism for horizontally moving a sensor bracket, the sensor bracket carrying a mapping sensor; and a port-door-and-sensor vertical-movement mechanism for vertically moving the port door and the sensor bracket with the port door holding the FOUP door.

Abstract: A container conveying system for conveying containers 8 containing substrates such as wafers within a clean room comprises a conveyance apparatus 7 disposed substantially in parallel with plural treatment apparatuses 5-1, 5-2, 5-3, . . . to convey the containers 8 and a transfer apparatus 9 capable of moving freely in an upper ceiling space within the clean room, characterized in that the plural treatment apparatuses 5-1, 5-2, 5-3, . . . are arranged on at least one side of a passage and respectively provided with interface devices 6-1, 6-2, 6-3, . . . on the side facing the passage; the interface devices 6-1, 6-2, 6-3, . . . are capable of temporarily receiving the containers 8 and moving the substrates from the interiors of the containers to the interiors of the treatment apparatuses 5-1, 5-2, 5-3, . . . and vice versa in a hermetically sealed atmosphere; and the transfer apparatus 9 delivers and receives the containers 8 between the conveyance apparatus 7 and the treatment apparatuses 5-1, 5-2, 5-3, . . .

Abstract: A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a mechanism for releasably holding the FOUP door; a port plate including an opening closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; a sensor horizontal-movement mechanism for horizontally moving a sensor bracket, the sensor bracket carrying a mapping sensor; and a port-door-and-sensor vertical-movement mechanism for vertically moving the port door and the sensor bracket with the port door holding the FOUP door.

Abstract: A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a mechanism for releasably holding the FOUP door; a port plate including an opening closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; a sensor horizontal-movement mechanism for horizontally moving a sensor bracket, the sensor bracket carrying a mapping sensor; and a port-door-and-sensor vertical-movement mechanism for vertically moving the port door and the sensor bracket with the port door holding the FOUP door.

Abstract: A work conveying system eliminates gravitational deflection of an extended articulated arm of a vertical mover. The conveying system includes a horizontal mover which carries the vertical mover and a work holder for delivering a workpiece to various apparatuses without dislocation. In conveying a workpiece horizontally, the vertical mover folds compactly to minimize air disturbance. Plural arm elements of the articulated arm overlap and are connected together in an alternate manner at their respective end portions, and the articulated arm is extended and contracted by pivotal movement of the arm elements, driven by a single drive unit. The horizontal mover is movable in an arbitrary horizontal plane within the upper ceiling space within the clean room. Shafts in the articulated arm and a rotary drive unit in the work holder have hollow interiors which are intercommunicated and at a negative pressure.

Abstract: A work conveying system eliminates gravitational deflection of an extended articulated arm of a vertical mover. The conveying system includes a horizontal mover which carries the vertical mover and a work holder for delivering a workpiece to various apparatuses without dislocation. In conveying a workpiece horizontally, the vertical mover folds compactly to minimize air disturbance. Plural arm elements of the articulated arm overlap and are connected together in an alternate manner at their respective end portions, and the articulated arm is extended and contracted by pivotal movement of the arm elements, driven by a single drive unit. The horizontal mover is movable in an arbitrary horizontal plane within the upper ceiling space within the clean room. Shafts in the articulated arm and a rotary drive unit in the work holder have hollow interiors which are intercommunicated and at a negative pressure.

Abstract: A FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a detachment/attachment mechanism for detaching/attaching the FOUP door and a holder mechanism for holding the FOUP door; a port plate including an opening portion, the opening portion being closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; and a port door vertical-movement mechanism for vertically moving the port door with the port door holding the FOUP door, so as to house the FOUP door. The port door includes a seal member for sealing a space defined between an outside wall of the FOUP door and an outside wall of the port door.

Abstract: A FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a detachment/attachment mechanism for detaching/attaching the FOUP door and a holder mechanism for holding the FOUP door; a port plate including an opening portion, the opening portion being closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; and a port door vertical-movement mechanism for vertically moving the port door with the port door holding the FOUP door, so as to house the FOUP door. The port door includes a seal member for sealing a space defined between an outside wall of the FOUP door and an outside wall of the port door.

Abstract: A drive-section-isolated FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a detachment/attachment mechanism for detaching/attaching the FOUP door and a holder mechanism for holding the FOUP door; a port plate including an opening portion, the opening portion being closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; a sensor horizontal-movement mechanism for horizontally moving a sensor bracket, the sensor bracket having a mapping sensor mounted on an upper portion thereof; and a port-door-and-sensor vertical-movement mechanism for vertically moving the port door and the sensor bracket with the port door holding the FOUP door, so as to house the FOUP door.