Abstract: A plurality of bar-like magnets are arranged in a vacuum chamber at an equal space interval to form a plurality of strong magnetic fields in a stripe-pattern form and the magnets are moved reciprocally in the direction of arrangement of the magnetic fields while changing gradually the stop points of the magnets over a work to be processed by etching or sputtering in a step-like manner so that the integral effect of each magnetic field acting on the work is uniform over the entire region of the work.

Abstract: A device for measuring the imbalance of a disc-like object has at least three load sensors having cantilevers for supporting the object at their corresponding measuring points selected, with a same angular distance therebetween, on a measuring circle which is concentric with a circular through-hole of the object. Each of the caltilevers is extended tangential to the measuring circle and directed perpendicular to the line of sight in the same sense when viewed from the center of the through-hole. A positioning device positions the center of the through-hole in the object relative to the load sensors, and a calculator device for calculating the imbalance of the object using the data supplied from the plural load sensors.

Abstract: A precise feeding table apparatus which comprises an XY-table assembly including a Y-table and an X-table mounted thereon. Electric motors for supplying a driving force to feed the X- and Y-tables are set on a base of the table apparatus. A driving shaft of the electric motor for the Y-table takes the form of a ball screw to cause a guide carriage supported by the driving shaft to make a minute reciprocation. A moment derived from the reciprocation of the guide carraige is not directly transmitted to the Y-table. A connection rod moving jointly with the guide carriage is connected to an output shaft fitted to the Y-table by means of a coupling including a fluid bearing. The fluid bearing supports the connecting rod in contactless relationship, thereby preventing the vibrations and moments of the connecting rod from being transmitted to the output shaft.