Abstract: An electronic-component testing device capable of achieving efficient heat-releasing from a self-heating electronic component and efficiently performing a desired test while maintaining the temperature of the electronic component in a predetermined range higher than ordinary temperature.

Abstract: An electronic-component testing device capable of achieving efficient heat-releasing from a self-heating electronic component and efficiently performing a desired test while maintaining the temperature of the electronic component in a predetermined range higher than ordinary temperature.

Abstract: An acoustic wave sensor includes a piezoelectric substrate, a transmitting electrode configured to excite a main acoustic wave propagating through a propagation region of an upper surface of the piezoelectric substrate, a receiving electrode configured to receive the propagated main acoustic wave, a first insulating film provided on the propagation region of the upper surface of the piezoelectric substrate, a second insulating film provided on the upper surface of the piezoelectric substrate to cover the first insulating film, and a reaction section provided on the upper surface of the second insulating film above the propagation region. The reaction section is configured to react with an object. A velocity of a transverse wave propagating through the first insulating film is higher than a velocity of a transverse wave propagating through the second insulating film. The acoustic wave sensor described above has high detection sensitivity.

Abstract: An acoustic wave sensor includes a piezoelectric substrate, a transmitting electrode configured to excite a main acoustic wave propagating through a propagation region of an upper surface of the piezoelectric substrate, a receiving electrode configured to receive the propagated main acoustic wave, a first insulating film provided on the propagation region of the upper surface of the piezoelectric substrate, a second insulating film provided on the upper surface of the piezoelectric substrate to cover the first insulating film, and a reaction section provided on the upper surface of the second insulating film above the propagation region. The reaction section is configured to react with an object. A velocity of a transverse wave propagating through the first insulating film is higher than a velocity of a transverse wave propagating through the second insulating film. The acoustic wave sensor described above has high detection sensitivity.

Abstract: An electronic part, an object of which is to improve temperature characteristics and electrical properties, includes a substrate (1), a comb-type electrode (2) that is disposed on the upper surface of the substrate (1), and a protective film (4) that covers the comb-type electrode (2) and has an uneven shape at its top surface. If the pitch width of one pitch in the uneven shape of the protective film (4) is L, the width of one pitch of a convex portion (4a) of the unevenness in the uneven shape of the protective film (4) is L1, the width of one pitch of a concave portion (4b) thereof is L2, the pitch width of one pitch of the comb-type electrode (2) is p, the width of one of electrode fingers which form the comb-type electrode (2) is p1 and the width between the electrode fingers is p2, then each parameter is set so that the following expressions are satisfied, L1?p1 and L2?p2 (herein, the correlations of L?p, p1+p2=p and L1+L2=L are satisfied).

Abstract: An electronic part, object of which is to improve temperature characteristics and electrical properties, includes a substrate (1), a comb-type electrode (2) that is disposed on the upper surface of the substrate (1), and a protective film (4) that covers the comb-type electrode (2) and has an uneven shape at its top surface. If the pitch width of one pitch in the uneven shape of the protective film (4) is L, the width of one pitch of a convex portion (4a) of the unevenness in the uneven shape of the protective film (4) is L1, the width of one pitch of a concave portion (4b) thereof is L2, the pitch width of one pitch of the comb-type electrode (2) is p, the width of one of electrode fingers which form the comb-type electrode (2) is p1 and the width between the electrode fingers is p2, then each parameter is set so that the following expressions are satisfied, L1?p1and L2?p2(herein, the correlations of L?p, p1+p2=p and L1+L2=L are satisfied).

Abstract: An electronic part, an object of which is to improve temperature characteristics and electrical properties, includes a substrate (1), a comb-type electrode (2) that is disposed on the upper surface of the substrate (1), and a protective film (4) that covers the comb-type electrode (2) and has an uneven shape at its top surface. If the pitch width of one pitch in the uneven shape of the protective film (4) is L, the width of one pitch of a convex portion (4a) of the unevenness in the uneven shape of the protective film (4) is L1, the width of one pitch of a concave portion (4b) thereof is L2, the pitch width of one pitch of the comb-type electrode (2) is p, the width of one of electrode fingers which form the comb-type electrode (2) is p1 and the width between the electrode fingers is p2, then each parameter is set so that the following expressions are satisfied, L1?p1 and L2?p2 (herein, the correlations of L?p, p1+p2=p and L1+L2=L are satisfied).

Abstract: A substrate is made of single crystal silicon and having a tuning folk shape. The substrate includes plural arms extending in parallel with each other and a joint section for connecting respecting ends of the arms with each other. An angular velocity sensor includes a barrier layer containing silicon oxide provided on each of the arms of the substrate, a first adhesion layer containing titanium provided on the barrier layer a first electrode layer containing at least one of titanium and titanium oxide provided on the first adhesion layer, an orientation control layer provided on the first electrode layer, a piezoelectric layer provided on the orientation control layer, a second adhesion layer provided on the piezoelectric layer, and a second electrode layer provided on the second adhesion layer. This angular velocity sensor has a small size and stable characteristics.

Abstract: In a surface acoustic wave (SAW) device, such as a SAW resonator or a SAW filter, loss is minimized and steep characteristics are improved. IDT electrodes and a reflector are provided to a piezoelectric substrate cut out at a cut-angle which allows the substrate to excite a leaky surface acoustic wave (LSAW). The IDT electrodes have a given film thickness and a given pitch “p” of finger-electrodes. A phase velocity of the SAW is reduced to slower than a phase velocity “vb”of a slow shear wave propagating on the piezoelectric substrate, and a resonance frequency “f” satisfies a relation of 2×p?vb/f. This structure allows the use of a Rayleigh surface acoustic wave (RSAW) which does not produce propagation loss, and improving insertion-loss and steep characteristics from those of a conventional SAW device using the LSAW.

Abstract: The present invention relates to an electronic part, and its object is to improve temperature characteristics and electrical properties. In order to attain the object, the electronic part according to the present invention includes a substrate (1), a comb-type electrode (2) that is disposed on the upper surface of the substrate (1), and a protective film (4) that covers the comb-type electrode (2) and has an uneven shape at its top surface.

Abstract: A piezoelectric vibrator which uses lithium tantalate as a piezoelectric material and of which main vibration is thickness shear vibration. The thickness direction of the vibrator forms angle of 0°±5° to the X-axis of a single crystal. The longitudinal direction of vibrator lies, with the X-axis used as a rotation axis, in direction n +57°±2° clockwise from the Y-axis of the single crystal. A ratio L/H of the length L of the vibrator to the thickness H is not less than 15. A ratio Le/H of the length Le of the exciting electrode to the thickness H of the vibrator element portion is 3–6. Accordingly, a vibrator having improved temperature characteristics and a large Q is realized.

Abstract: In a surface acoustic wave (SAW) filter including a substrate and an electrode formed on the substrate, the electrode includes a base layer, a first metal layer made of a metal consisting of Al or consisting mainly of Al, and having a given orientation relative to the substrate, a second layer for preventing the first metal layer from migration of Al atoms occurring in vertical to the substrate, and a third layer for adjusting a thickness of the layer. In this SAW filter having an arbitrary layer thickness, the layer hardly causes grain boundary diffusion, and grains of the layer can be made fine for effective resistance to stress. Thus, in this SAW filter, the migration of the Al atoms of the electrode that is associated with the SAW propagation-induced stress imposed on the electrode is inhibited. Accordingly, the filter exhibits excellent resistance against electric power.

Abstract: An antenna duplexer has a power durability to a signal input from an antenna terminal and has stable characteristics. The antenna duplexer includes an input terminal, a transmission filter including a surface acoustic wave (SAW) filter having an input port connected to the input terminal, a phase shifter having an input port connected to an output port of the transmission filter, a reception filter having an input port connected to an output port of the phase shifter, an output terminal connected to the output port of the reception filter, and an antenna terminal connected between the transmission filter and the phase shifter. The transmission filter has a power durability at the output port of the filter, being equal to or larger than a power durability at the input port of the filter.

Abstract: In a surface acoustic wave (SAW) device such as a SAW resonator or a SAW filter, loss is minimized and steep characteristics are improved. IDT electrodes and a reflector are provided to a piezoelectric substrate cut out at a cut-angle which allows the substrate to excite leaky surface acoustic wave (LSAW). The IDT electrodes have a given film thickness and a given pitch “p” of finger-electrodes. An phase velocity of the SAW is reduced to slower than an phase velocity “vb” of a slow shear wave propagating on the substrate, and resonance frequency “f” satisfies a relation of 2×p≦vb/f. This structure allows using Rayleigh surface acoustic wave (RSAW) which does not produce propagation loss, and improving insertion-loss and steep characteristics from those of a conventional SAW device using LSAW.

Abstract: A piezoelectric vibrator which uses lithium tantalate as a piezoelectric material and of which main vibration is thickness shear vibration. The thickness direction of the vibrator forms angle of 0°±5°. The longitudinal direction of vibrator lies, with the X-axis used as a rotation axis, in direction n +57°±2° clockwise from the Y-axis of the single crystal. A ratio L/H of the length L of the vibrator to the thickness H is not less than 15. A ratio Le/H of the length Le of the exciting electrode to the thickness H of the vibrator element portion is 3-6. Accordingly, a vibrator having improved temperature characteristics and a large Q is realized.

Abstract: In a surface acoustic wave (SAW) filter including a substrate and an electrode formed on the substrate, the electrode includes a base layer, a first metal layer made of a metal consisting of Al or consisting mainly of Al, and having a given orientation relative to the substrate, a second layer for preventing the first metal layer from migration of Al atoms occurring in vertical to the substrate, and a third layer for adjusting a thickness of the layer. In this SAW filter having an arbitrary layer thickness, the layer hardly causes grain boundary diffusion, and grains of the layer can be made fine for effective resistance to stress. Thus, in this SAW filter, the migration of the Al atoms of the electrode that is associated with the SAW propagation-induced stress imposed on the electrode is inhibited. Accordingly, the filter exhibits excellent resistance against electric power.

Abstract: An antenna duplexer has a power durability to a signal input from an antenna terminal and has stable characteristics. The antenna duplexer includes an input terminal, a transmission filter including a surface acoustic wave (SAW) filter having an input port connected to the input terminal, a phase shifter having an input port connected to an output port of the transmission filter, a reception filter having an input port connected to an output port of the phase shifter, an output terminal connected to the output port of the reception filter, and an antenna terminal connected between the transmission filter and the phase shifter. The transmission filter has a power durability at the input terminal, being equal to or larger than a power durability at the antenna terminal.

Abstract: A parallel swash plate type fluid machine includes a barrel which is rotatable integrally with a rotary shaft, a plurality of cylinder sections directed in the axial direction and opening respectively on the opposite sides of the barrel, pistons fitted in the respective cylinder sections and capable of projecting on the opposite sides of the barrel, and a pair of swash plates for restraining strokes of the pistons provided in a mutually parallel alignment on the opposite sides of the barrel. Parts communicate with respective fluid chambers in the plurality of cylinder sections and have inlet sides connected with each other through a twisted flow passageway and have outlet sides connected with each other through another twisted flow passageway.

Abstract: An axial plunger pump or motor of the type such that a valve plate having a suction port and a discharge port drilled therein is fixed to a casing in which a rotary shaft is mounted. A cylinder block having one end surface opposed to the valve plate is coupled to the rotary shaft. A plurality of bores whose one ends can be communicated with the suction port and the discharge port are drilled in the cylinder block in parallel to the rotary shaft. A plurality of plungers, which can reciprocate within the respective bores in accordance with rotation of the rotary shaft are slidably fitted in the bores on the side of the other ends. A seal plate positioned between the valve plate and the cylinder block and making slide contact with the valve plate is coupled to the rotary shaft.