Patents by Inventor Tetsuo Komai
Tetsuo Komai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11198160Abstract: A detoxifying device 100 having an inner wall 104 that forms a flow passage 103 through which treatment gas flows includes a first piping 130 that forms a part of the flow passage 103, a replaceable piping section 170 that forms a part of the flow passage 103 at the position downstream of the first piping 130, and is connected thereto for sprinkling the cleaning water to remove the solid product adhering to the inner wall 104, and a second piping 150 that forms a part of the flow passage 103 at the position downstream of the piping section 170, and is connected thereto.Type: GrantFiled: October 9, 2019Date of Patent: December 14, 2021Assignee: EBARA CORPORATIONInventors: Takanori Inada, Tetsuo Komai, Tetsuro Sugiura
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Patent number: 10978315Abstract: The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).Type: GrantFiled: May 28, 2015Date of Patent: April 13, 2021Assignee: EBARA CORPORATIONInventors: Atsushi Shiokawa, Tetsuro Sugiura, Shinichi Sekiguchi, Takashi Kyotani, Tetsuo Komai, Norio Kimura, Keiichi Ishikawa, Toru Osuga
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Patent number: 10920981Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.Type: GrantFiled: August 18, 2017Date of Patent: February 16, 2021Assignee: EBARA CORPORATIONInventors: Kazutomo Miyazaki, Tetsuo Komai, Seiji Kashiwagi, Kazumasa Hosotani, Takeshi Eda
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Patent number: 10641272Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.Type: GrantFiled: March 10, 2015Date of Patent: May 5, 2020Assignee: EBARA CORPORATIONInventors: Koichi Iwasaki, Hiroki Furuta, Keiichi Ishikawa, Tetsuo Komai, Shinichi Sekiguchi
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Patent number: 10641256Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.Type: GrantFiled: March 12, 2015Date of Patent: May 5, 2020Assignee: EBARA CORPORATIONInventors: Hiroki Furuta, Koichi Iwasaki, Keiichi Ishikawa, Tetsuo Komai, Shinichi Sekiguchi
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Publication number: 20200114402Abstract: A detoxifying device 100 having an inner wall 104 that forms a flow passage 103 through which treatment gas flows includes a first piping 130 that forms a part of the flow passage 103, a replaceable piping section 170 that forms a part of the flow passage 103 at the position downstream of the first piping 130, and is connected thereto for sprinkling the cleaning water to remove the solid product adhering to the inner wall 104, and a second piping 150 that forms a part of the flow passage 103 at the position downstream of the piping section 170, and is connected thereto.Type: ApplicationFiled: October 9, 2019Publication date: April 16, 2020Inventors: Takanori INADA, Tetsuo KOMAI, Tetsuro SUGIURA
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Patent number: 10557631Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.Type: GrantFiled: July 31, 2018Date of Patent: February 11, 2020Assignee: EBARA CORPORATIONInventors: Kazutomo Miyazaki, Tetsuo Komai, Seiji Kashiwagi
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Publication number: 20190212007Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.Type: ApplicationFiled: August 18, 2017Publication date: July 11, 2019Inventors: Kazutomo MIYAZAKI, Tetsuo KOMAI, Seiji KASHIWAGI, Kazumasa HOSOTANI, Takeshi EDA
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Patent number: 10215407Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.Type: GrantFiled: November 6, 2015Date of Patent: February 26, 2019Assignee: EBARA CORPORATIONInventors: Kazutomo Miyazaki, Tetsuo Komai, Toyoji Shinohara, Seiji Kashiwagi
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Publication number: 20190041058Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.Type: ApplicationFiled: July 31, 2018Publication date: February 7, 2019Inventors: Kazutomo MIYAZAKI, Tetsuo KOMAI, Seiji KASHIWAGI
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Patent number: 10040026Abstract: The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.Type: GrantFiled: July 5, 2016Date of Patent: August 7, 2018Assignee: EBARA CORPORATIONInventors: Hiroki Furuta, Tetsuro Sugiura, Tetsuo Komai, Atsushi Oyama, Takashi Kyotani, Shinichi Sekiguchi, Takanori Inada
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Publication number: 20180051878Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.Type: ApplicationFiled: November 6, 2015Publication date: February 22, 2018Inventors: Kazutomo MIYAZAKI, Tetsuo KOMAI, Toyoji SHINOHARA, Seiji KASHIWAGI
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Publication number: 20170200622Abstract: The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).Type: ApplicationFiled: May 28, 2015Publication date: July 13, 2017Applicant: EBARA CORPORATIONInventors: Atsushi SHIOKAWA, Tetsuro SUGIURA, Shinichi SEKIGUCHI, Takashi KYOTANI, Tetsuo KOMAI, Norio KIMURA, Keiichi ISHIKAWA, Toru OSUGA
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Publication number: 20170007961Abstract: The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.Type: ApplicationFiled: July 5, 2016Publication date: January 12, 2017Applicant: EBARA CORPORATIONInventors: Hiroki FURUTA, Tetsuro SUGIURA, Tetsuo KOMAI, Atsushi OYAMA, Takashi KYOTANI, Shinichi SEKIGUCHI, Takanori INADA
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Publication number: 20150260192Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a pair of multistage pump rotors each of which comprises a plurality of rotors arranged on a rotating shaft, and the at least one abatement part is connected to an interstage of the multistage pump rotors.Type: ApplicationFiled: March 10, 2015Publication date: September 17, 2015Inventors: Koichi IWASAKI, Hiroki FURUTA, Keiichi ISHIKAWA, Tetsuo KOMAI, Shinichi SEKIGUCHI
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Publication number: 20150260174Abstract: A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.Type: ApplicationFiled: March 12, 2015Publication date: September 17, 2015Inventors: Hiroki FURUTA, Koichi IWASAKI, Keiichi ISHIKAWA, Tetsuo KOMAI, Shinichi SEKIGUCHI
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Patent number: 7635501Abstract: An exhaust pipe (10) includes an inner cylinder (11) having an exhaust gas passage (10?) formed therein, an outer cylinder provided outside the inner cylinder with a gap (15) being formed therebetween and a heating device (13) attached to the inner cylinder 11. The gap (15) is communicated with the exhaust gas passage (10?). When a gas is discharged from the reaction vacuum chamber, a vacuum is created not only in the exhaust gas passage (10?) but also in the gap (15). Therefore, release of heat from the heating device to the outside can be suppressed. Consequently, the inner cylinder (11) can be efficiently heated to a sufficiently high temperature, thus preventing deposition and accumulation of a substance contained in the discharged gas on the inner surface of the inner cylinder (11). The deposition and accumulation of such a substance can also be prevented by forming a gas flow layer (18) of, for example, an inert gas, along the inner surface of the inner cylinder (11.Type: GrantFiled: February 14, 2001Date of Patent: December 22, 2009Assignee: Ebara CorporationInventors: Tetsuo Komai, Norihiko Nomura
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Patent number: 7607914Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: GrantFiled: February 23, 2007Date of Patent: October 27, 2009Assignee: Ebara CorporationInventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao
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Publication number: 20070160946Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.Type: ApplicationFiled: February 23, 2007Publication date: July 12, 2007Inventors: Tetsuo Komai, Kohtaro Kawamura, Takeshi Tsuji, Rikiya Nakamura, Kazutaka Okuda, Keiichi Ishikawa, Tomonori Ohashi, Yoshiro Takemura, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao
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Patent number: 7112060Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).Type: GrantFiled: April 12, 2004Date of Patent: September 26, 2006Assignee: Ebara CorporationInventors: Yoshiro Takemura, Tetsuo Komai, Kotaro Kawamura, Takeshi Tsuji, Kazutaka Okuda, Rikiya Nakamura, Keiichi Ishikawa, Tomonori Ohashi, Yasutaka Muroga, Tadakazu Nishikawa, Yuji Shirao, Hiroyuki Yamada