Abstract: In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate in a treatment chamber, a fixed guide 12 and a movable guide 13 made of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate 10, and both end portions of the movable guide 13 are supported by supporting members. In this construction, these supporting members are fitted to fixed members 15A and 15B arranged in a Y direction with the mounting plate 10 placed therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide member 13 can be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates with different widthwise dimensions.

Abstract: In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate (11) in a treatment chamber (6), a fixed guide (12) and a movable guide (13) made of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate (10), and both end portions of the movable guide (13) are supported by supporting members (18). In this construction, these supporting members (18) are fitted to fixed members (15A) and (15B) arranged in a Y direction with the mounting plate (10) placed therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide member (13) can be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates (11) with different widthwise dimensions.

Abstract: A motor pulley for driving a photosensitive drum and a motor gear for driving a developing roller are fixed to a rotating shaft of a motor. The developing roller is provided with a developing roller driving gear which engages with the motor gear, and the photosensitive roller is provided with a photoreceptor driving pulley, to which a driving force from the motor pulley is transmitted.