Patent number: 6110291
Abstract: A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.
Type:
Grant
Filed:
August 7, 1996
Date of Patent:
August 29, 2000
Assignee:
Mitsubishi Denki Kabushiki Kaisha
Inventors:
Kenyu Haruta, Koichi Ono, Hitoshi Wakata, Mutsumi Tsuda, Yoshio Saito, Keisuke Nanba, Kazuyoshi Kojima, Tetsuya Takami, Akihiro Suzuki, Tomohiro Sasagawa, Kenichi Kuroda, Toshiyuki Oishi, Yukihiko Wada, Akihiko Furukawa, Yasuji Matsui, Akimasa Yuki, Takaaki Kawahara, Hideki Yabe, Taisuke Furukawa, Kouji Kise, Noboru Mikami, Tsuyoshi Horikawa, Tetsuo Makita, Kazuo Kuramoto, Naohiko Fujino, Hiroshi Kuroki, Tetsuo Ogama, Junji Tanimura
