Patents by Inventor Tetsuo NARITOMI

Tetsuo NARITOMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Concentration detection method and pressure-type flow rate control device
    Patent number: 10962513
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: March 30, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kenji Aikawa, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi, Tsutomu Shinohara, Takahiro Matsuda, Kouji Nishino
  • CONCENTRATION DETECTION METHOD AND PRESSURE-TYPE FLOW RATE CONTROL DEVICE
    Publication number: 20200018736
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Application
    Filed: September 27, 2017
    Publication date: January 16, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kenji AIKAWA, Kaoru HIRATA, Takahiro IMAI, Tetsuo NARITOMI, Tsutomu SHINOHARA, Takahiro MATSUDA, Kouji NISHINO