Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.

Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.

Abstract: A hydraulic shock absorber enables its piston rod to be locked near its minimum length position and allows the locked condition to be visually confirmed easily. A cap member is secured to a distal end portion of a piston rod extending from a cylinder part, and a dust cover is secured to the cap member. A lock member is secured to an end of the cylinder part from which the piston rod extends to the outside. The lock member is cut and bent upward to form engaging portions. The cap member is cut and bent downward to form engaging pieces and windows. With the piston rod contracted to near its minimum length position, the cap member is rotated to engage the engaging portions and the engaging pieces with each other, thereby locking the piston rod. The engaged condition of the engaging portions and the engaging pieces can be visually confirmed through the windows.

Abstract: An object of the invention is to provide such an oriented polyester film that has a constant thickness, and is excellent in dimensional stability at a high temperature and dimensional stability to temperature change in a working temperature range. The invention relates to an oriented polyester film containing as a major component of a substrate layer polyethylene-2,6-naphthalene dicarboxylate, being stretched at least in one direction, and having a film thickness of from 12 to 250 ?m, wherein (1) a coefficient of linear thermal expansion ?t at a temperature of from 30 to 100° C. is from 0 to 15 ppm/° C. in both longitudinal and width directions of the film, and (2) a thermal shrinkage rate at 100° C. for 10 minutes is 0.5% or less in both longitudinal and width directions of the film.

Abstract: An object of the present invention is to provide a thin biaxially oriented film excellent in dimensional stability against humidity change, as well as a magnetic recording medium and a film capacitor using the same. The present invention provides a single layered or laminated biaxially oriented film comprising an aromatic polyester (a) and a polyolefin (b) having a melting point of from 230 to 280° C., wherein the ratio of the polyolefin (b) is from 2 to 60% based on the entire weight of the film, and the film thickness is from 1 to 10 ?m.

Abstract: In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

Abstract: There is provided a white polyester film which retains practically satisfactory reflectivity with respect to the visible light range, can undergo stable film production even when inorganic fine particles are added in high concentration and is stable against a dimensional change caused by heat generated from a light source. The polyester film is a polyester film which comprises a composition comprising a copolyester and 30 to 50 wt % of inorganic fine particles based on the composition, shows a thermal shrinkage at 85° C. in longitudinal and transverse directions of not higher than 0.7% and a thermal shrinkage at 150° C. in the longitudinal and transverse directions of not higher than 5.0%, and shows an average reflectance at a wavelength of 400 to 700 nm of not lower than 90%.

Abstract: The present invention is a multilayer polyester film comprising a layer A and a layer B which are laminated alternately, the layer A constituting the outermost layer on both sides of the film, wherein (1) the layer A comprises a polyester A, and the layer B comprises a polyester B, (2) the melting point of the polyester A is higher than the melting point of the polyester B by at least 15° C., (3) the layer A is a layer having an oriented structure, and the layer B is a layer having a substantially unoriented structure, (4) the ratio (a/b) of the total thickness (a) of the layer A to the total thickness (b) of the layer B is 0.01 to 3, and (5) the in-plane tensile strength of the multilayer polyester film is 50 MPa or lower at a maximum, and the difference between its maximum value and minimum value is 20 MPa or smaller; and a method for producing the multilayer polyester film.

Abstract: A seat weight measuring apparatus capable of securely withstanding large force due to large load, such as force in the event of a vehicle collision, applied to a vehicle seat. Normally, a small force is applied to a rear pin bracket and the sleeves through which a pivot bolt is inserted do not substantially collide with the inner peripheries of holes. As a large force is applied to the rear pin bracket, a stopper bolt collides with a base frame and the rear pin bracket collides with the pivot bolt. The large force exerted on the rear pin bracket is shared and borne by portions of the frame thereby reducing the localized stresses in the frame.

Abstract: There is provided a white polyester film which retains practically satisfactory reflectivity with respect to the visible light range, can undergo stable film production even when inorganic fine particles are added in high concentration and is stable against a dimensional change caused by heat generated from a light source. The polyester film is a polyester film which comprises a composition comprising a copolyester and 30 to 50 wt % of inorganic fine particles based on the composition, shows a thermal shrinkage at 85° C. in longitudinal and transverse directions of not higher than 0.7% and a thermal shrinkage at 150° C. in the longitudinal and transverse directions of not higher than 5.0%, and shows an average reflectance at a wavelength of 400 to 700 nm of not lower than 90%.

Abstract: In order to improve a controllability of etching characteristics by way of precisely and freely controlling a flow or a density distribution of a processing gas introduced into a processing chamber, a plasma etching apparatus includes, as a gas inlet for introducing an etching gas into a plasma generation region PS in a chamber 10, an upper gas inlet (an upper central shower head 66a and an upper peripheral shower head 68a) for introducing a gas through an upper electrode 38; and a side gas inlet for introducing a gas through a sidewall of the chamber 10. The side gas inlet 104 has a side shower head 108 attached to the sidewall of the chamber 10.

Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.

Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.

Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.

Abstract: E2F-inhibiting compounds are represented by the general formula: R1-A-R2 wherein A represents a peptide sequence comprising a partial amino acid sequence having at least 12 continuous residues in the sequence of the dimerization region or DNA binding region of the E2F family), which are useful as a therapeutic agent of diseases such as tumor and arteriosclerosis, for which abnormal cellular growth is responsible.

Abstract: The present invention is a multilayer polyester film comprising a layer A and a layer B which are laminated alternately, the layer A constituting the outermost layer on both sides of the film, wherein (1) the layer A comprises a polyester A, and the layer B comprises a polyester B, (2) the melting point of the polyester A is higher than the melting point of the polyester B by at least 15° C., (3) the layer A is a layer having an oriented structure, and the layer B is a layer having a substantially unoriented structure, (4) the ratio (a/b) of the total thickness (a) of the layer A to the total thickness (b) of the layer B is 0.01 to 3, and (5) the in-plane tensile strength of the multilayer polyester film is 50 MPa or lower at a maximum, and the difference between its maximum value and minimum value is 20 MPa or smaller; and a method for producing the multilayer polyester film.

Abstract: A white biaxially oriented polyester film for use as a base film for receiving an ink jet printer image and a base film for receiving an ink jet printer image which satisfy the following requirements (1) to (4): (1) the content of titanium oxide particles having an average particle diameter of 0.1 to 0.5 ?m in the polyester film is 5 to 20 wt %; (2) the polyester film has an average glossiness of 65 to 95%; (3) the polyester film has an X-ray diffraction intensity ratio (F-1/F-2) represented by the following formal (1): 0.05?F-1/F-2?0.15 (1) ?wherein (F-1) is an X-ray diffraction intensity on a plane (1{overscore (1)}0) parallel to the surface of the film and (F-2) is an X-ray diffraction intensity on a plane (100) parallel to the surface of the film; and (4) the polyester film has a static friction coefficient of 0.3 to 0.6. The base film for receiving an ink jet printer image of the present invention is excellent in adhesion, glossiness, opacifying properties and transportability.

Abstract: In a port structure 16A in a semiconductor processing system 2, a door 20A is disposed in a port 12A defined by upright wall 52 and 54. A table 48 opposed to the port is disposed outside the system. Defined on the table is a mount region 76 for mounting an open type cassette 18A for a process subject substrate W. A hood 50 is disposed rotatable relative to the table. The hood defines in its closed position a closed space surrounding the mount region and port, the space having a size to receive the cassette. First ventholes 58 are formed in the upright walls and/or the door so as to introduce gas from within the system into the closed space in the hood. Second ventholes 72 are formed in the table so as to discharge the gas can be discharged out of the closed space.

Abstract: A seat weight measuring apparatus capable of securely withstanding large force due to large load, such as force in the event of a vehicle collision, applied to a vehicle seat. Normally, a small force is applied to a rear pin bracket and the sleeves through which a pivot bolt is inserted do not substantially collide with the inner peripheries of holes. As a large force is applied to the rear pin bracket, a stopper bolt collides with a base frame and the rear pin bracket collides with the pivot bolt. The large force exerted on the rear pin bracket is shared and borne by portions of the frame thereby reducing the localized stresses in the frame.

Abstract: A device for measuring a weight of a seat, including the weight of an occupant sitting on the seat.