Abstract: Provided is an electrostatic chuck device including: an electrostatic chuck plate which has a dielectric substrate having a placement surface on which a wafer is placed and electrodes positioned in the dielectric substrate; a focus ring which is installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface; and a power connection portion which connects the electrode and a power supply. The electrostatic chuck plate has a first electrode positioned in a region overlapping the placement surface in plan view and a second electrode positioned in a region overlapping the focus ring in plan view. The power connection portion includes a power wire electrically connecting the first electrode and the second electrode via a current regulator.

Abstract: A wafer support device includes a dielectric substrate and an RF electrode provided in the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arranged in a planar direction of the dielectric substrate. The wafer support device has: a short-circuit member interconnecting the plurality of zone electrodes; and a main power supply rod connected to the short-circuit member from a back side of the dielectric substrate.

Abstract: An electrostatic chuck device includes: an electrostatic chuck plate having a dielectric substrate having a placement surface on which a wafer is placed and an adsorption electrode positioned in the dielectric substrate; a metal base supporting the electrostatic chuck plate from a back surface side opposite to the placement surface; and a focus ring installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface. The electrostatic chuck plate has a ring adsorption region which is adsorbed to the focus ring and is located on a surface positioned on the same side as the placement surface and has a base adsorption region which is adsorbed to the metal base and located on a back surface opposite to the placement surface.

Abstract: A titanium oxide powder of the present invention has a BET specific surface area of 5 m2/g or more and 15 m2/g or less and contains polyhedral-shaped titanium oxide particles having eight or more faces, in which a mass reduction rate in a case of being heated at 800° C. for 1 hour in an air atmosphere is 0.03% by mass or more and 0.5% by mass or less.

Abstract: In an ultraviolet-shielding particle coated with silicon oxide of the present invention, a surface of the ultraviolet-shielding particle is coated with a silicon oxide coat, at least one functional group selected from the group consisting of an alkyl group, an alkenyl group, and a cycloalkyl group is present on a surface of the silicon oxide coat, and a content of the functional group is 0.0001% by mass or more and 0.30% by mass or less.

Abstract: The titanium oxide powder of the present invention is a titanium oxide powder which has a BET specific surface area of 5 m2/g or more and 15 m2/g or less, and contains octahedral-shaped particles, wherein each octahedral-shaped particle thereof has line segments each of which connects two apexes which face each other and has a maximum value of the line segments, an average value of the maximum values is 300 nm or higher and 1000 nm or lower, and a value (D90/D10) is 1 or higher and 3 or lower, wherein the value is obtained by dividing a value (D90), which corresponds to 90% in a cumulative number percentage of the maximum values of line segments each of which connects two apexes which face each other, by a value (D10) which corresponds to 10% in the cumulative number percentage.

Abstract: The titanium oxide powder of the present invention is a titanium oxide powder having a BET specific surface area of 5 m2/g or more and 15 m2/g or less and containing polyhedral-shaped titanium oxide particles having eight or more faces, in which an L value in Lab color space thereof is 75 or higher.

Abstract: A titanium oxide powder of the present invention has a BET specific surface area of 5 m2/g or more and 15 m2/g or less and contains polyhedral-shaped titanium oxide particles having eight or more faces, in which a mass reduction rate in a case of being heated at 800° C. for 1 hour in an air atmosphere is 0.03% by mass or more and 0.5% by mass or less.

Abstract: Titanium oxide particles of the present invention include octahedral-shaped particles, in which each particle of the octahedral-shaped particles has line segments each of which connects two apexes which face each other and has a maximum value of the line segments, an average value of the maximum values is 300 nm or more and 1,000 nm or less, and a value (the average value of the maximum values/BET-converted average particle diameter) obtained by dividing the average value of the maximum values of the line segments by an average particle diameter converted from a BET specific surface area is 1.0 or more and 2.5 or less.

Abstract: In an ultraviolet-shielding particle coated with silicon oxide of the present invention, a surface of the ultraviolet-shielding particle is coated with a silicon oxide coat, at least one functional group selected from the group consisting of an alkyl group, an alkenyl group, and a cycloalkyl group is present on a surface of the silicon oxide coat, and a content of the functional group is 0.0001% by mass or more and 0.30% by mass or less.

Abstract: Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.

Abstract: Titanium oxide particles of the present invention include octahedral-shaped particles, in which each particle of the octahedral-shaped particles has line segments each of which connects two apexes which face each other and has a maximum value of the line segments, an average value of the maximum values is 300 nm or more and 1,000 nm or less, and a value (the average value of the maximum values/BET-converted average particle diameter) obtained by dividing the average value of the maximum values of the line segments by an average particle diameter converted from a BET specific surface area is 1.0 or more and 2.5 or less.

Abstract: Provided are a silicon oxide-coated zinc oxide, a method for producing the same, a composition and a cosmetic including a silicon oxide-coated zinc oxide. The silicon oxide-coated zinc oxide is a silicon oxide-coated zinc oxide formed by coating surfaces of zinc oxide particles with a silicon oxide coat, in which an average particle diameter of the zinc oxide particles is in a range of more than 50 nm and 500 nm or less, and, when an abundance ratio of silicon in the silicon oxide coat in a Q3 environment is indicated by Q3, and an abundance ratio in a Q4 environment is indicated by Q4, Q3+Q4?0.6 and Q4/(Q3+Q4)?0.5 are satisfied.

Abstract: The present invention provides silicon oxide-coated zinc oxide in which, in a silica coating formed of a silicate alkali metal salt, the elution of zinc ions is suppressed, a method for preparing the same, a composition containing silicon oxide-coated zinc oxide, and a cosmetic material. The silicon oxide-coated zinc oxide of the present invention is silicon oxide-coated zinc oxide formed by coating surfaces of zinc oxide particles with a silicon oxide coating, in which an average primary particle diameter of the zinc oxide particles is more than 50 nm and 500 nm or less, and when held in a buffer solution having a pH of 5 for 1 hour, an elution ratio S of the zinc oxide defined by following Expression (1) is 50% or less.

Abstract: Provided is silicon oxide-coated zinc oxide, which can inhibit a decrease in viscosity resulting from a carbomer in a case where the silicon oxide-coated zinc oxide is used in water-based materials, a composition containing silicon oxide-coated zinc oxide, and a cosmetic product. The silicon oxide-coated zinc oxide of the present invention contains zinc oxide particles and a silicon oxide coating on a surface of the zinc oxide particles, in which an electric conductivity of a water suspension of the silicon oxide-coated zinc oxide is 120 ?S/cm or less.

Abstract: Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.

Abstract: Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.

Abstract: Provided are a silicon-oxide-coated zinc oxide capable of suppressing the elution of zinc ions from zinc oxide particles, a method for manufacturing the same, a silicon-oxide-coated-zinc-oxide-containing composition, and a cosmetic. The silicon-oxide-coated zinc oxide is a silicon-oxide-coated zinc oxide formed by coating the surfaces of zinc oxide particles with a silicon oxide coating, in which the average particle diameter of the zinc oxide particles is in a range of 1 nm or more and 50 nm or less, when the abundance ratio of silicon in the silicon oxide coating in a Q3 environment is indicated by Q3, and the abundance ratio in a Q4 environment is indicated by Q4, Q3+Q4?0.6 and Q4/(Q3+Q4)?0.5, and furthermore, the decomposition ratio of Brilliant Blue generated by the photocatalytic activity of the zinc oxide particles is 3% or less.

Abstract: Provided are a silicon oxide-coated zinc oxide, a method for producing the same, a composition and a cosmetic including a silicon oxide-coated zinc oxide. The silicon oxide-coated zinc oxide is a silicon oxide-coated zinc oxide formed by coating surfaces of zinc oxide particles with a silicon oxide coat, in which an average particle diameter of the zinc oxide particles is in a range of more than 50 nm and 500 nm or less, and, when an abundance ratio of silicon in the silicon oxide coat in a Q3 environment is indicated by Q3, and an abundance ratio in a Q4 environment is indicated by Q4, Q3+Q4?0.6 and Q4/(Q3+Q4)?0.5 are satisfied.

Abstract: Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.