Patents by Inventor Tetsuro Ohbayashi
Tetsuro Ohbayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8853905Abstract: Provided is a radial direction controller capable of handling changes in negative bearing stiffness according to the mounting orientation.Type: GrantFiled: December 27, 2012Date of Patent: October 7, 2014Assignee: Osaka Vacuum, Ltd.Inventors: Tetsuro Ohbayashi, Mitsunori Watanabe
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Publication number: 20140159526Abstract: Provided is a radial direction controller capable of handling changes in negative bearing stiffness according to the mounting orientation.Type: ApplicationFiled: December 27, 2012Publication date: June 12, 2014Applicant: Osaka Vacuum Ltd.Inventors: Tetsuro Ohbayashi, Mitsunori Watanabe
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Patent number: 8337164Abstract: An object is to provide a turbomolecular pump with rotor and stator blades alternatively arranged that can prevent collision between the adjacent rotor and stator blades due to air inrush, which may take place due to vacuum break in a system operation, prevent excessive centrifugal force to a hub portion of a rotor, and further enhance pumping performance. A blade cross sectional profile taken along the circumferential direction of each of the rotor blades of a rotor blade stage has an upstream portion curved convexly backward in a rotational direction of the rotor and a downstream portion curved convexly forward in the rotational direction of the rotor, thereby forming the blade cross sectional profile into an S-shape or inversed S-shape.Type: GrantFiled: July 9, 2009Date of Patent: December 25, 2012Assignee: Osaka Vacuum, Ltd.Inventors: Tetsuro Ohbayashi, Takeshi Shoji
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Patent number: 7909583Abstract: A pump device and a pump unit of the pump device. The pump device includes a low-temperature flat plate group (low-temperature portion) having a plurality of flat plates as low-temperature objects arranged parallel with each other at specified intervals in a direction crossing a flow passage for a gas; a high-temperature flat plate group (high-temperature portion) having a plurality of flat plates as high-temperature objects arranged parallel with each other at specified intervals in a direction crossing the flow passage; and, a temperature-operating device operating the temperature of at least one of these flat plate groups so that a temperature difference occurs between these flat plate groups. The flat plates are displaced from each other in the flow direction of the flow passage, and a heat insulating layer is interposed between the low-temperature flat plates and the high-temperature flat plates.Type: GrantFiled: March 23, 2005Date of Patent: March 22, 2011Assignee: Osaka Vacuum, Ltd.Inventors: Hiroshi Sugimoto, Yoshio Sone, Tetsuro Ohbayashi
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Publication number: 20110008176Abstract: An object is to provide a turbomolecular pump with rotor and stator blades alternatively arranged that can prevent collision between the adjacent rotor and stator blades due to air inrush, which may take place due to vacuum break in a system operation, prevent excessive centrifugal force to a hub portion of a rotor, and further enhance pumping performance. A blade cross sectional profile taken along the circumferential direction of each of the rotor blades of a rotor blade stage has an upstream portion curved convexly backward in a rotational direction of the rotor and a downstream portion curved convexly forward in the rotational direction of the rotor, thereby forming the blade cross sectional profile into an S-shape or inversed S-shape.Type: ApplicationFiled: July 9, 2009Publication date: January 13, 2011Inventors: Tetsuro OHBAYASHI, Takeshi SHOJI
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Publication number: 20080159877Abstract: A pump apparatus comprises a low-temperature flat plate group (a low-temperature portion) C having flat plates 5 as a plurality of low-temperature bodies arranged parallel with each other with intervals in a direction crossing a passage 4 of gas, a high-temperature flat plate group (a high-temperature portion) H having flat plates 6 as a plurality of high-temperature bodies arranged parallel with each other with intervals in the direction crossing the passage 4, and temperature operation means for operating at least one of temperatures of the flat plate groups to generate temperature difference between the flat plate groups. The flat plates 5 and the flat plates 6 are displaced from each other in a flow direction in the passage 4, and a heat insulating layer interposed between the flat plates 5 and the flat plates 6.Type: ApplicationFiled: March 22, 2005Publication date: July 3, 2008Applicants: Kyoto University, Osaka Vacuum, Ltd.Inventors: Hiroshi Sugimoto, Yoshio Sone, Tetsuro Ohbayashi
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Patent number: 5221179Abstract: Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk are cut in annular recesses to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port.Type: GrantFiled: October 1, 1991Date of Patent: June 22, 1993Assignee: Osaka Vacuum, Ltd.Inventors: Tatsuji Ikegami, Tetsuro Ohbayashi, Keiichi Yoshida, Masashi Iguchi
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Patent number: 5219269Abstract: A vacuum pump includes a casing provided with an inlet port and an outlet port; a turbo molecular pump unit disposed in an uppermost section, with respect to a flow direction of the gas, of the casing; a peripheral groove vacuum pump unit disposed in a middle section of the casing; and a vortex vacuum pump unit disposed in a lowermost section, with respect to the flow direction of the gas, of the casing.Type: GrantFiled: October 1, 1991Date of Patent: June 15, 1993Assignee: Osaka Vacuum, Ltd.Inventors: Tatsuji Ikegami, Tetsuro Ohbayashi, Keiichi Yoshida, Masashi Iguchi
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Patent number: 5217346Abstract: A vacuum pump includes a casing provided with an inlet port and an outlet port, a peripheral groove vacuum pump unit disposed in an upper section, with respect to a flow direction of the gas, of the casing, and a vortex vacuum pump unit disposed in a lower section, with respect to the flow direction of the gas, of the casing. The vacuum pump unit and the vortex vacuum pump unit have a common rotor. Since the common rotor is provided for the vacuum pump unit and the vortex vacuum pump unit, the dynamic balance of the rotor can be easily adjusted and the rotor rotates with a minimal amount of vibration.Type: GrantFiled: October 1, 1991Date of Patent: June 8, 1993Assignee: Osaka Vacuum, Ltd.Inventors: Tatsuji Ikegami, Tetsuro Ohbayashi, Keiichi Yoshida, Masashi Iguchi
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Patent number: 5160250Abstract: Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port.Type: GrantFiled: October 1, 1991Date of Patent: November 3, 1992Assignee: Osaka Vacuum, Ltd.Inventors: Tatsuji Ikegami, Tetsuro Ohbayashi, Keiichi Yoshida, Masashi Iguchi
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Patent number: 5074747Abstract: Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk are cut in annular recesses to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port.Type: GrantFiled: September 14, 1990Date of Patent: December 24, 1991Assignee: Osaka Vacuum, Ltd.Inventors: Tatsuji Ikegami, Tetsuro Ohbayashi, Keiichi Yoshida, Masashi Iguchi