Abstract: A predetermined process is performed on two target substrates using a substrate processing device that includes two processing parts for performing a substrate process on each of the two target substrates, a gas supply mechanism for separately supplying gases to the two processing parts, and a common exhaust mechanism for collectively exhausting the gases inside the two processing parts. A first mode is executed in which an HF gas and an NH3 gas are supplied to one of the two processing parts, and the HF gas is not supplied to the other of the two processing parts. Subsequently, a second mode is executed in which the HF gas and the NH3 gas are supplied to the two processing parts under the same gas conditions. In the first mode, a pressure difference is prevented from occurring between the two processing parts.

Abstract: A gas treatment method of performing a gas treatment on a substrate having a recess includes: disposing the substrate having the recess in a chamber; adjusting a pressure inside the chamber to a predetermined pressure by supplying a pressure adjustment gas into the chamber in an evacuated state to increase the pressure inside the chamber; and subsequently, performing the gas treatment on a side wall of the recess of the substrate by causing a treatment reaction by a process gas in the chamber, wherein the process gas causing the treatment reaction is used as at least a part of the pressure adjustment gas in the adjusting the pressure.

Abstract: A non-transitory computer-readable recording medium stores a program for causing a computer to execute a process, the process includes extracting a plurality of candidates for an entity in a knowledge graph based on a word in text, collecting related images related to the extracted candidates, generating image clusters of the collected related images for the respective candidates, calculating degrees of similarity between the generated image clusters, and determining, as the entity, a candidate of which the image cluster indicates a higher degree of similarity among the candidates.

Abstract: A predetermined process is performed on two target substrates using a substrate processing device that includes two processing parts for performing a substrate process on each of the two target substrates, a gas supply mechanism for separately supplying gases to the two processing parts, and a common exhaust mechanism for collectively exhausting the gases inside the two processing parts. A first mode is executed in which an HF gas and an NH3 gas are supplied to one of the two processing parts, and the HF gas is not supplied to the other of the two processing parts. Subsequently, a second mode is executed in which the HF gas and the NH3 gas are supplied to the two processing parts under the same gas conditions. In the first mode, a pressure difference is prevented from occurring between the two processing parts.

Abstract: There is provided a substrate processing apparatus of performing a predetermined substrate process on a plurality of target substrates under a vacuum atmosphere, including: a plurality of processing parts each configured to perform the substrate process on each of the plurality of target substrates; a gas supply mechanism configured to supply a processing gas to each of the plurality of processing parts; a single exhaust mechanism configured to exhaust the processing gas within the plurality of processing parts; and a control part configured to control the single exhaust mechanism to collectively exhaust the processing gas within the plurality of processing parts, and control the gas supply mechanism to separately supply the processing gas into each of the plurality of processing parts such that a difference between internal pressures of the plurality of processing parts is prevented.

Abstract: A population formation method is disclosed. Keywords are extracted from public information of providers included as elements in a first provider group. Each element is calculated based on a predetermined attribute value. A first attribute is for the providers of the public information. The attribute value is changed with time. Each of rules set for duplicate keywords is to determine one of the attributes by using one of the duplicate keywords. Provider groups are formed for new public information based on the duplicate keywords and the rules. A provider group having a similar relationship with a first provider group is specified by a distribution of the attribute value of a different attribute from the first attribute. A new provider group corresponding to the first provider group is formed by the providers, for whom the attribute value of the first attribute corresponds to the predetermined attribute value.

Abstract: A predetermined process is performed on two target substrates using a substrate processing device that includes two processing parts for performing a substrate process on each of the two target substrates, a gas supply mechanism for separately supplying gases to the two processing parts, and a common exhaust mechanism for collectively exhausting the gases inside the two processing parts. A first mode is executed in which an HF gas and an NH3 gas are supplied to one of the two processing parts, and the HF gas is not supplied to the other of the two processing parts. Subsequently, a second mode is executed in which the HF gas and the NH3 gas are supplied to the two processing parts under the same gas conditions. In the first mode, a pressure difference is prevented from occurring between the two processing parts.

Abstract: According to an aspect of an embodiment, a method may include obtaining a wordlist from a digital document. The method may further include creating a keyword candidate list derived from the wordlist and noting the relationships between the keyword candidates. The method may also include obtaining scores for the keyword candidates. The method may further include selecting keyword candidates as keywords of the digital document based on the scores and the relationships between the keyword candidates.

Abstract: An intake sound introducing apparatus has, for example, a branch pipe, a sound creator, a communication pipe, and a resonator. The branch pipe branches from an intake pipe of the engine. The sound creator includes a vibrator that vibrates with the intake pulsation of the intake sound propagating within the branch pipe. The communication pipe provides communication between the inside of a casing of the sound creator and the inside of the cabin. The resonator is provided in the communication pipe.

Abstract: A vehicle such as an automobile includes: a vehicle body having an opening; an opening-closing member that closes the opening; a drive member that drives the opening-closing member so as to open and/or close the opening; a controller that controls the drive member to control the opening-closing member between a fully open position and a fully closed position; and an elastic member provided at a mating portion of the closed opening-closing member and the vehicle body and inserted between the closed opening-closing member and the vehicle body. The controller controls the drive member in a stopping state of the vehicle and opens the opening-closing member from the fully closed position so as to reduce a pressure acting upon the elastic member.

Abstract: An etching method includes loading a target substrate W into a chamber 40, the target substrate W having a silicon nitride film formed thereon and at least one of a polysilicon film and a silicon oxide film formed adjacent to the silicon nitride film; supplying a fluorine (F)-containing gas and an O2 gas into the chamber 40, while at least the O2 gas is excited; and selectively etching the silicon nitride film with respect to at least one of the polysilicon film and the silicon oxide film using the F-containing gas and the O2 gas.

Abstract: A data classification method which classifies a plurality of data into a plurality of classification items based on a feature quantity included in the data, the method includes calculating, by a processor, an appearance probabilities in which training data including the feature quantity appears in the classification items in a distribution of the data, generating, by the processor, a rule having the feature quantity and a weighting of the feature quantity based on a plurality of the training data having the feature quantity based on the appearance probabilities; and classifying, by the processor, the plurality of data according to the rule.

Abstract: According to an aspect of an embodiment, a method may include obtaining a wordlist from a digital document. The method may further include creating a keyword candidate list derived from the wordlist and noting the relationships between the keyword candidates. The method may also include obtaining scores for the keyword candidates. The method may further include selecting keyword candidates as keywords of the digital document based on the scores and the relationships between the keyword candidates.

Abstract: A population formation method is disclosed. Keywords are extracted from public information of providers included as elements in a first provider group. Each element is calculated based on a predetermined attribute value. A first attribute is for the providers of the public information. The attribute value is changed with time. Each of rules set for duplicate keywords is to determine one of the attributes by using one of the duplicate keywords. Provider groups are formed for new public information based on the duplicate keywords and the rules. A provider group having a similar relationship with a first provider group is specified by a distribution of the attribute value of a different attribute from the first attribute. A new provider group corresponding to the first provider group is formed by the providers, for whom the attribute value of the first attribute corresponds to the predetermined attribute value.

Abstract: An intake sound introducing apparatus has, for example, a branch pipe, a sound creator, a communication pipe, and a resonator. The branch pipe branches from an intake pipe of the engine. The sound creator includes a vibrator that vibrates with the intake pulsation of the intake sound propagating within the branch pipe. The communication pipe provides communication between the inside of a casing of the sound creator and the inside of the cabin. The resonator is provided in the communication pipe.

Abstract: An intake sound introducing apparatus has, for example, a branch pipe, a sound creator, a communication pipe, and a resonator. The branch pipe branches from an intake pipe of the engine. The sound creator includes a vibrator that vibrates with the intake pulsation of the intake sound propagating within the branch pipe. The communication pipe provides communication between the inside of a casing of the sound creator and the inside of the cabin. The resonator is provided in the communication pipe.

Abstract: There is provided a substrate processing apparatus of performing a predetermined substrate process on a plurality of target substrates under a vacuum atmosphere, including: a plurality of processing parts each configured to perform the substrate process on each of the plurality of target substrates; a gas supply mechanism configured to supply a processing gas to each of the plurality of processing parts; a single exhaust mechanism configured to exhaust the processing gas within the plurality of processing parts; and a control part configured to control the single exhaust mechanism to collectively exhaust the processing gas within the plurality of processing parts, and control the gas supply mechanism to separately supply the processing gas into each of the plurality of processing parts such that a difference between internal pressures of the plurality of processing parts is prevented.

Abstract: An etching method includes loading a target substrate W into a chamber 40, the target substrate W having a silicon nitride film formed thereon and at least one of a polysilicon film and a silicon oxide film formed adjacent to the silicon nitride film; supplying a fluorine (F)-containing gas and an O2 gas into the chamber 40, while at least the O2 gas is excited; and selectively etching the silicon nitride film with respect to at least one of the polysilicon film and the silicon oxide film using the F-containing gas and the O2 gas.

Abstract: A data classification method which classifies a plurality of data into a plurality of classification items based on a feature quantity included in the data, the method includes calculating, by a processor, an appearance probabilities in which training data including the feature quantity appears in the classification items in a distribution of the data, generating, by the processor, a rule having the feature quantity and a weighting of the feature quantity based on a plurality of the training data having the feature quantity based on the appearance probabilities; and classifying, by the processor, the plurality of data according to the rule.

Abstract: The present invention aims to provide recycled fibers having a low dirt content and excellent appearance and strength properties derived from sanitary products. Recycled fibers having a superabsorbent polymer (SAP) content of less than 10% obtained by subjecting a sanitary product containing a cellulose pulp to a recycling process per se have good appearance, and moldings prepared by using the recycled fibers also have excellent appearance and strength properties. Further, the recycled fibers preferably have a dirt area fraction of 50,000 mm2/m2 or less when determined by a staining assay using cobalt (II) chloride hexahydrate, and a Canadian standard freeness of 600 ml or more.