Abstract: In order to automate the positioning at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points W1 and W2 at which the circumference of a disc-like object 47 such as a wafer and the locus 43 of a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisector 42 of the section of a line combining 2 points with these and the radius r of the disc-like object. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result.

Abstract: In order to automate the positioning at the steps of reference position teaching and normal manufacturing at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points W1 and W2 at which the circumference of a disc-like object 47 such as a wafer and the locus 43 of a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisector 42 of the section of a line combining 2 points with these and the radius r of the disc-like object, in the present invention. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result.

Abstract: In a noise measuring system comprising a microphone array and a directivity forming section for controlling the direction of directivity of the microphone array, the directivity forming section includes delay section and adding section, and the optimal value of a delay time of the delay section is set in such a manner that a noise isolation characteristic for causing any mobile noise generator not targeted for noise measurement to come off a directional plane or a directional line formed in the direction of directivity of the microphone array and a deterioration characteristic of the directivity of the microphone array balance with each other.