Abstract: A first MISFET is formed on a semiconductor layer of an SOI substrate in a circuit region and a second MISFET composing a TEG for VC inspection is formed on the semiconductor layer of the SOI substrate in a TEG region. An interlayer insulating film is formed, contact holes are formed in the interlayer insulating film, and plugs are formed in the contact holes, respectively. In the TEG region, the plugs include a plug electrically connected to both the semiconductor substrate composing the SOI substrate and the semiconductor layer composing the SOI substrate.

Abstract: A device for damping a transmitted vibration by the moment of inertia of a fly wheel and the adjustable resistance force of a viscous magnetic fluid to allow the viscous magnetic fluid exerts its property even under no external power source. A sleeve with an attached ball nut is disposed in a first cylinder so as to reciprocate. The reciprocating motion of the sleeve is converted into a rotational motion by a ball screw to rotate a fly wheel in a second cylinder and a generator rotating shaft. Between the fly wheel and the inner surface of the second cylinder, a sealed space is formed in which a viscous magnetic fluid is sealed. A magnetic field generating unit which generates a magnetic field running across the sealed space with the fly wheel serving as a part of a magnetic circuit is disposed on the inner circumference of the second cylinder.

Abstract: A device for damping a transmitted vibration by the moment of inertia of a fly wheel and the adjustable resistance force of a viscous magnetic fluid to allow the viscous magnetic fluid exerts its property even under no external power source. A sleeve with an attached ball nut is disposed in a first cylinder so as to reciprocate. The reciprocating motion of the sleeve is converted into a rotational motion by a ball screw to rotate a fly wheel in a second cylinder and a generator rotating shaft. Between the fly wheel and the inner surface of the second cylinder, a sealed space is formed in which a viscous magnetic fluid is sealed. A magnetic field generating unit which generates a magnetic field running across the sealed space with the fly wheel serving as a part of a magnetic circuit is disposed on the inner circumference of the second cylinder.