Abstract: A vacuum pump comprises: a pump housing; a motor configured to rotate in the pump housing; a rotor configured to be rotatably driven by the motor; a stator provided between the rotor and the pump housing; and a heat insulating member provided between the stator and the pump housing. The heat insulating member has a cylindrical main body and a processing gripping target portion provided on at least one of inner and outer peripheral surfaces of the main body.

Abstract: A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprises: a state determination section configured to determine whether or not the vacuum pump is in a predetermined exhaust state; and a deposition amount determination section configured to receive a deposition amount indicator for an amount of a deposition substance in the pump to determine as excessive deposition when the deposition amount indicator in the predetermined exhaust state is equal to or greater than an acceptable deposition threshold.

Abstract: A vacuum pump comprises a cylindrical rotor; a cylindrical stator which discharges gas in cooperation with the rotor; and a tubular base to which the stator is fixed. The stator has no fitting structure with respect to the base and is fixed to the base in a concentric state. A pin hole is formed on the stator and the base respectively, and a positioning pin for achieving the concentric state is inserted into each pin hole.

Abstract: A vacuum pump comprises: a stator; a rotor that rotates with respect to the stator; a pump casing in which the stator and the rotor are contained, and a suction port and a through-hole for exhaust are provided; a first exhaust duct fixed to an outer circumference of the pump casing so as to communicate with the through-hole for exhaust; and a second exhaust duct that is inserted into at least the through-hole for exhaust with a gap interposed, an exhaust gas passing inside the second exhaust duct.

Abstract: A turbo-molecular pump comprises: a pump rotor including rotor blades and a rotor cylindrical section; stationary blades facing the rotor blades; a cylindrical stator facing the rotor cylindrical section; a base housing the cylindrical stator; and a heating member for heating the cylindrical stator. An emissivity of an outer surface of the cylindrical stator and an emissivity of an outer surface of a member facing the cylindrical stator, the outer surface facing the cylindrical stator, are lower than the emissivity of outer surfaces of the rotor blades, the outer surfaces facing the stationary blades.

Abstract: A vacuum pump comprises a vacuum exhaust section, the vacuum exhaust section including a stator, and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator, a suction port; a base; an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; and a conductance increasing function section formed on at least one of the outer peripheral surface of the stator and an inner peripheral surface of the base, the outer peripheral surface and the inner peripheral surface facing an exhaust path for gas discharged by the rotor cylindrical section and the stator leading to the exhaust port.

Abstract: A vacuum pump comprises: a pump housing; a motor configured to rotate in the pump housing; a rotor configured to be rotatably driven by the motor; a stator provided between the rotor and the pump housing; and a heat insulating member provided between the stator and the pump housing. The heat insulating member has a cylindrical main body and a processing gripping target portion provided on at least one of inner and outer peripheral surfaces of the main body.

Abstract: A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprises: a state determination section configured to determine whether or not the vacuum pump is in a predetermined exhaust state; and a deposition amount determination section configured to receive a deposition amount indicator for an amount of a deposition substance in the pump to determine as excessive deposition when the deposition amount indicator in the predetermined exhaust state is equal to or greater than an acceptable deposition threshold.

Abstract: A vacuum pump comprises a cylindrical rotor; a cylindrical stator which discharges gas in cooperation with the rotor; a base housing at least a part of the stator and having a through hole formed at a position facing an outer periphery of the stator; a heating member passing through the through hole from an atmosphere side to a vacuum side to have thermal contact with an outer peripheral surface of the stator to heat the stator; and an axial seal member which vacuum-seals a gap between the through hole and the heating member.

Abstract: A vacuum pump comprises: a pump; a pump stator; a base having an exhaust-side space into which the gas discharged by the pump rotor and the pump stator flows and an exhaust port in communication with the exhaust-side space; and a groove pumping element that is provided in a ring shape around a rotational axis of the pump rotor on a downstream end face of the pump rotor or on an inner bottom of the base opposite to the downstream end face and discharges gas from an inner peripheral side of the pump rotor to the exhaust-side space, the groove pumping element being circumferentially provided with alternating grooves defining a concave portion and convex portions, and the groove pumping element being located outside an exhaust path through which gas flows into the exhaust-side space and is thereafter discharged to the exhaust port.

Abstract: A vacuum pump comprises: a stator; a rotor that rotates with respect to the stator; a pump casing in which the stator and the rotor are contained, and a suction port and a through-hole for exhaust are provided; a first exhaust duct fixed to an outer circumference of the pump casing so as to communicate with the through-hole for exhaust; and a second exhaust duct that is inserted into at least the through-hole for exhaust with a gap interposed, an exhaust gas passing inside the second exhaust duct.

Abstract: A turbo-molecular pump comprises: a pump rotor including rotor blades and a rotor cylindrical section; stationary blades facing the rotor blades; a cylindrical stator facing the rotor cylindrical section; a base housing the cylindrical stator; and a heating member for heating the cylindrical stator. An emissivity of an outer surface of the cylindrical stator and an emissivity of an outer surface of a member facing the cylindrical stator, the outer surface facing the cylindrical stator, are lower than the emissivity of outer surfaces of the rotor blades, the outer surfaces facing the stationary blades.

Abstract: A vacuum pump comprises a cylindrical rotor; a cylindrical stator which discharges gas in cooperation with the rotor; and a tubular base to which the stator is fixed. The stator has no fitting structure with respect to the base and is fixed to the base in a concentric state. A pin hole is formed on the stator and the base respectively, and a positioning pin for achieving the concentric state is inserted into each pin hole.

Abstract: A vacuum pump comprises a cylindrical rotor; a cylindrical stator which discharges gas in cooperation with the rotor; a base housing at least a part of the stator and having a through hole formed at a position facing an outer periphery of the stator; a heating member passing through the through hole from an atmosphere side to a vacuum side to have thermal contact with an outer peripheral surface of the stator to heat the stator; and an axial seal member which vacuum-seals a gap between the through hole and the heating member.

Abstract: A vacuum pump comprises: a pump; a pump stator; a base having an exhaust-side space into which the gas discharged by the pump rotor and the pump stator flows and an exhaust port in communication with the exhaust-side space; and a groove pumping element that is provided in a ring shape around a rotational axis of the pump rotor on a downstream end face of the pump rotor or on an inner bottom of the base opposite to the downstream end face and discharges gas from an inner peripheral side of the pump rotor to the exhaust-side space, the groove pumping element being circumferentially provided with alternating grooves defining a concave portion and convex portions, and the groove pumping element being located outside an exhaust path through which gas flows into the exhaust-side space and is thereafter discharged to the exhaust port.

Abstract: A vacuum pump comprises a vacuum exhaust section, the vacuum exhaust section including a stator, and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator, a suction port; a base; an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; and a conductance increasing function section formed on at least one of the outer peripheral surface of the stator and an inner peripheral surface of the base, the outer peripheral surface and the inner peripheral surface facing an exhaust path for gas discharged by the rotor cylindrical section and the stator leading to the exhaust port.