Patents by Inventor Tetsuyai Watanabe

Tetsuyai Watanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of detecting defects on an object
    Patent number: 7940383
    Abstract: A method for detecting defects on an object includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the object and white-color, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the object and passed through a filter which blocks diffraction light resulting from patterns formed on the object, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the object, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.
    Type: Grant
    Filed: December 3, 2009
    Date of Patent: May 10, 2011
    Assignees: Hitachi, Ltd., Hitachi High-Technologies Corporation
    Inventors: Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuyai Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu
  • Apparatus And Method For Testing Defects
    Publication number: 20100088042
    Abstract: An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the specimen, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks diffraction light resulting from patterns formed on the specimen, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the specimen, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.
    Type: Application
    Filed: December 3, 2009
    Publication date: April 8, 2010
    Inventors: Minori NOGUCHI, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga, Keiji Sakai, Takanori Ninomiya, Tetsuyai Watanabe, Hisato Nakamura, Takahiro Jingu, Yoshio Morishige, Shuichi Chikamatsu