Patents by Inventor Tetsuyuki MAEDA

Tetsuyuki MAEDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing system and substrate processing apparatus
    Patent number: 10903098
    Abstract: There is provided a technique that includes a first controller configured to acquire event data generated at a time of transferring a substrate and alarm data generated at a time of occurrence of a transfer error, a recorder configured to, while recording a transfer operation of the substrate as first image data, record the transfer operation of the substrate as second image data having a higher resolution than the first image data, a second controller configured to store the first image data in a first memory based on the event data, and store the second image data in a second memory based on the alarm data, and an operating controller configured to display at least the first image data and the second image data. The second controller displays both the first image data and the second image data on a same screen.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: January 26, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Akihiko Yoneda, Kazuhide Asai, Tetsuyuki Maeda, Naoya Miyashita, Nobuyuki Miyakawa, Tadashi Okazaki, Hideo Yanase
  • SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20200043763
    Abstract: There is provided a technique that includes a first controller configured to acquire event data generated at a time of transferring a substrate and alarm data generated at a time of occurrence of a transfer error, a recorder configured to, while recording a transfer operation of the substrate as first image data, record the transfer operation of the substrate as second image data having a higher resolution than the first image data, a second controller configured to store the first image data in a first memory based on the event data, and store the second image data in a second memory based on the alarm data, and an operating controller configured to display at least the first image data and the second image data. The second controller displays both the first image data and the second image data on a same screen.
    Type: Application
    Filed: July 30, 2019
    Publication date: February 6, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Akihiko YONEDA, Kazuhide ASAI, Tetsuyuki MAEDA, Naoya MIYASHITA, Nobuyuki MIYAKAWA, Tadashi OKAZAKI, Hideo YANASE