Patents by Inventor Theng Leong

Theng Leong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing improved membranes
    Publication number: 20060258273
    Abstract: The present invention relates generally to the field of chemical/mechanical polishing of substrates. In particular the invention relates to methods of producing improved membranes for use in chemical/mechanical polishing systems. The present invention provides a method of improving the properties of a flexible membrane for use in chemical/mechanical polishing, the method including subjecting the membrane to elevated temperatures.
    Type: Application
    Filed: June 14, 2004
    Publication date: November 16, 2006
    Inventors: Meng Koh, Choon Poh, Inn Goh, Theng Leong, Teck Neo, Bing Wang