Patents by Inventor Theo De Keyzer

Theo De Keyzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Devices and methods for detecting orientation and shape of an object
    Patent number: 6788991
    Abstract: Embodiments of the present invention provide a system and method for receiving and dropping-off a horizontally oriented flat substrate, for example a semiconductor wafer, on a substrate support structure and verifying the correct positioning and orientation (level) of the substrate. Additional embodiments provide a system and method for indicating the presence or absence, orientation and concavity or convexity of a substrate.
    Type: Grant
    Filed: October 9, 2002
    Date of Patent: September 7, 2004
    Assignee: ASM International N.V.
    Inventors: Martien Johan De Haas, Hermanus Jozef Clemens Maria Terhorst, Erik Ter Vrugt, Theo De Keyzer
  • Devices and methods for detecting orientation and shape of an object
    Publication number: 20040073328
    Abstract: Embodiments of the present invention provide a system and method for receiving and dropping-off a horizontally oriented flat substrate, for example a semiconductor wafer, on a substrate support structure and verifying the correct positioning and orientation (level) of the substrate. Additional embodiments provide a system and method for indicating the presence or absence, orientation and concavity or convexity of a substrate.
    Type: Application
    Filed: October 9, 2002
    Publication date: April 15, 2004
    Inventors: Martien Johan De Haas, Hermanus Jozef Clemens Maria Terhorst, Erik Ter Vrugt, Theo De Keyzer