Abstract: Apparatus and methods are disclosed for vibration-free cryogenic cooling, suitable for TEM and other analytic equipment. A thermal battery includes one or more of: a cryocooler, a thermal switch, a thermal cold storage reservoir, and a cold finger. The thermal reservoir is mounted outside a sample chamber. The cold finger provides thermal coupling between the reservoir and a sample holder inside the sample chamber. In varying embodiments, sample holder and sample temperatures are regulated by a heater or by an inline variable thermal resistor. Cyclic phased operation includes cooling the reservoir, decoupling the cryocooler from the reservoir, and temperature-regulated passive vibration-free thermal energy extraction from sample to reservoir. The described system delivers a stand time of 12 hours at 20 K. Temperature regulation, a hybrid thermal switch, damping of thermal fluctuations, and material selection are described.

Abstract: Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) and to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5, z6; z3, z4) between the reference mass (22) and the first object (2) and is applied to a controller (6) to actuate the actuator (8).

Abstract: In a lithographic projection apparatus, a measuring system configured to measure the position of the projection system relative to a reference frame includes sensors rigidly mounted in relation to counterpart sensors of a measuring system measuring the substrate table position. An angular encoder which sends light from a target down two optical paths having opposite sensitivities to tilt is used to measure rotation of the projection system about its optical axis.