Patents by Inventor Theodore Andrew Khoury

Theodore Andrew Khoury has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of testing a semiconductor device by automatically measuring probe tip parameters
    Patent number: 6127831
    Abstract: An integrated probe tip (20) parameter measuring device (70) is integrated onto the chuck (24) or substrate holder of a probe test station (10). Probe tip (20) force can be simultaneously measured for either a single probe tip, several probe, or all of the probe tips on a probe card (18). Integrating the measurement of probe tip (20) parameters such as probe tip force into a test station (10) yields real-time data about the probe process and allows feedback between measured probe tip parameters and probe chuck overdrive in the vertical direction. This integrated testing is done by periodically testing probe tip (20) parameters during the probing of die (26) on a wafer (22).
    Type: Grant
    Filed: April 21, 1997
    Date of Patent: October 3, 2000
    Assignee: Motorola, Inc.
    Inventors: Theodore Andrew Khoury, Raun L. Goode, Larry J. Bustos