Abstract: A reflecting Offner-like optical system is described which is suitable for use in a photolithographic system in which the magnification is approximately 1 to 1, and where the format is flexible. The primary mirror is split into two halves, which are movable with respect to each other. Magnification is slightly changeable by moving the two halves of the split primary mirror forward and backward by slight amounts. The reflecting optical system is moved in a reciprocating manner across a nominally stationary photomask and an intermittently stationary flexible format, which includes a segment of a roll-to-roll web. The arctuate object and image are rotated 90 degrees by flat mirrors to enable efficient scan coverage as the entire mirror system shuttles back and forth across the mask and the web. Center to center distance between the object and the image fields is increased by the use of an aspheric secondary mirror.

Abstract: Compact linear diode arrays are imaged on linear light modulator arrays by optical systems employing objective asphere/prism segments together with a field lens such that the beams rise in object space or image space, and individual beams are imaged on individual modulator segments with chosen form factors and spacings. More than one laser array can be directed in superimposed fashion onto a single modulator array using laser polarization modes and a polarization beam combiner.