Patents by Inventor Theodorus M. Michielsen

Theodorus M. Michielsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5828122
    Abstract: A semiconductor device comprises a substrate (1) with a plane surface (4) on which a layer structure (2) is formed in a number of layers (5, 7, 9, 13, 15, 17). The side of the substrate on which the layer structure was formed is fastened to a plane support body (18) by means of a glue layer (19) which encompasses spacer elements (20). These spacer elements are fastened to the surface of the substrate and all have the same height measured from the surface (4). In fastening the substrate to the support body, glue is provided and the substrate is pressed onto the support body so that the pressure is evenly distributed over the spacer elements.
    Type: Grant
    Filed: March 12, 1997
    Date of Patent: October 27, 1998
    Assignee: U.S. Philips Corporation
    Inventors: Henricus G. R. Maas, Ronald Dekker, Theodorus M. Michielsen, Wilhelmus T. A. J. Van Den Einden
  • Patent number: 5028558
    Abstract: A method of manufacturing a silicon-on-insulator semiconductor body is characterized by the steps consisting in that a carrier body is temporarily connected to a supporting body with accurately flat and parallel major surfaces and having a thickness of at least 1/8 of the largest dimension of the carrier body, in that the free major surface of the carrier body is mechanically polished to a precision of at least 1/2 .mu.m flatness, in that the carrier body is detached from the supporting body and the polished major surface is temporarily connected to the supporting body and the other major surface of the carrier body is mechanically polished to a precision of at least 1/2 .mu.m flatness and a parallelism between the major surfaces of at least 1/2 .mu.m whereupon a semiconductor body is connected through a major surface permanently to a major surface of the carrier body, in that then the semiconductor body is mechanically ground to a thickness of at least 50 .mu.
    Type: Grant
    Filed: April 11, 1989
    Date of Patent: July 2, 1991
    Assignee: U.S. Philips Corporation
    Inventors: Jan Haisma, Cornelis L. Adema, Johan G. De Bruin, Theodorus M. Michielsen, Gijsbertus A. C. M. Spierings
  • Patent number: 5009689
    Abstract: In a method of manufacturing a semiconductor device, at least a support body (1) and a monocrystalline semiconductor body (2) are provided with at least one flat optically smooth surface obtained by means of bulk-reducing polishing (mirror polishing), while at least the semiconductor body is provided at the optically smooth surface with an oxide layer (3). The two bodies (1 and 2) are brought into contact with each other in a dust-free atmosphere after their flat surfaces have been cleaned in order to obtain a mechanical connection. Before the bodies are brought into contact with each other, at least the oxide layer (3) on the semiconductor body (2) is subjected to a bonding-activating operation, while after a connection has been formed between the surfaces, radiation (5) of a laser is focused on the connection surface of the two bodies and material of at least the semiconductor body is molten locally near the connection surface by means of the laser radiation.
    Type: Grant
    Filed: January 27, 1987
    Date of Patent: April 23, 1991
    Assignee: U.S. Philips Corporation
    Inventors: Jan Haisma, Cornelis L. Alting, Theodorus M. Michielsen
  • Patent number: 4983251
    Abstract: A method for manufacturing a semiconductor device comprising at least a support body and a monocrystalline semiconductor body, in which both bodies are provided with at least one flat optically smooth surface obtained by means of bulk-reducing polishing (mirror polishing), and at least the semiconductor body is then provided at the optically smooth surface with an electrically insulating layer with at least the electrically insulating layer on the semiconductor body being subjected to a bonding-activating operation, whereupon both bodies after their flat surfaces have been cleaned, are contacted with each other in a dust-free atmosphere in order to obtain a rigid mechanical connection, after which they are subjected to a heat treatment of at least 250.degree. C., whereupon the semiconductor body is etched to a thin layer having a thickness lying between 0.05 and 100 .mu.m.
    Type: Grant
    Filed: June 16, 1986
    Date of Patent: January 8, 1991
    Assignee: U.S. Philips Corporation
    Inventors: Jan Haisma, Theodorus M. Michielsen, Jan A. Pals