Patents by Inventor Theodorus marcus NAGTEGAAL

Theodorus marcus NAGTEGAAL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method
    Patent number: 11860554
    Abstract: The invention provides an object positioner comprising:—an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,—a thermal device, which thermal device is configured to provide at least a part of the object with a first object temperature, which first object temperature differs from the support surface temperature by a first predetermined temperature difference.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: January 2, 2024
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Mark Johannes Hermanus Frencken, Theodorus Marcus Nagtegaal, Oleg Viacheslavovich Voznyi
  • Stage apparatus and method for calibrating an object loading process
    Patent number: 11556064
    Abstract: The invention provides a stage apparatus, comprising an object support comprising a ring shaped protrusion having an outer radius in a first plane, and configured to support an object with a radius in the first plane larger than the outer radius of the ring shaped protrusion. The stage apparatus further comprises a sensor module configured to detect the object support, and the object when it is arranged on the object support. The stage apparatus further comprises a processing unit configured to receive one or more signals from the sensor module, and to determine, based on said one or more signals, a position of the object relative to the ring shaped protrusion when the object is arranged on the object support. The processing unit is further configured to determine, based on said position of the object, an offset value representing the position of the object relative to the ring shaped protrusion.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: January 17, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Gijs Kramer, Theodorus Marcus Nagtegaal, André Schreuder, Anna Catharina Verkaik
  • OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LITHOGRAPHIC APPARATUS, OBJECT INSPECTION APPARATUS, DEVICE MANUFACTURING METHOD
    Publication number: 20220214626
    Abstract: The invention provides an object positioner comprising:—an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,—a thermal device, which thermal device is configured to provide at least a part of the object with a first object temperature, which first object temperature differs from the support surface temperature by a first predetermined temperature difference.
    Type: Application
    Filed: March 27, 2020
    Publication date: July 7, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Mark Johannes Hermanus FRENCKEN, Theodorus Marcus NAGTEGAAL, Oleg Viacheslavovich VOZNYI
  • STAGE APPARATUS AND METHOD FOR CALIBRATING AN OBJECT LOADING PROCESS
    Publication number: 20210311403
    Abstract: The invention provides a stage apparatus, comprising an object support comprising a ring shaped protrusion having an outer radius in a first plane, and configured to support an object with a radius in the first plane larger than the outer radius of the ring shaped protrusion. The stage apparatus further comprises a sensor module configured to detect the object support, and the object when it is arranged on the object support. The stage apparatus further comprises a processing unit configured to receive one or more signals from the sensor module, and to determine, based on said one or more signals, a position of the object relative to the ring shaped protrusion when the object is arranged on the object support. The processing unit is further configured to determine, based on said position of the object, an offset value representing the position of the object relative to the ring shaped protrusion.
    Type: Application
    Filed: July 22, 2019
    Publication date: October 7, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Gijs KRAMER, Theodorus marcus NAGTEGAAL, André SCHREUDER, Anna Catharina VERKAIK