Patents by Inventor Theresa Marie O. Liu

Theresa Marie O. Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ramp temperature techniques for improved mean wafer before clean
    Patent number: 7205205
    Abstract: A method of operating a substrate processing chamber comprising transferring a first substrate into the substrate processing chamber and heating the substrate to a first temperature of at least 510° C.; depositing an insulating layer over the first substrate while reducing the temperature of the substrate from the first temperature to a second temperature that is lower than the first temperature; transferring the first substrate out of the substrate processing chamber; removing unwanted deposition material formed on interior surfaces of the chamber during the depositing step by introducing reactive halogen species into the chamber while increasing the temperature of chamber; transferring a second substrate into the substrate processing chamber and heating the substrate to the first temperature; and depositing an insulating layer over the second substrate while reducing the temperature of the substrate from the first temperature to the second temperature.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: April 17, 2007
    Assignee: Applied Materials
    Inventors: Won B. Bang, Yen-Kun Wang, Kevin Mikio Mukai, Theresa Marie O. Liu