Patents by Inventor Thierry Enot
Thierry Enot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240326087Abstract: A method for rectifying a polymer film including the steps of: a) providing a first substrate including a front surface, the front surface having a surface energy less than approximately 22 mJ/m2, b) spreading a thermoplastic polymer on the front surface leading to the formation of a polymer film and at least one dewetted zone of the front surface, c) providing a second substrate including a non-stick surface, d) bonding the polymer film and the non-stick surface leading to the formation of a bonding interface having an adhesion energy lower than the adhesion energy between the polymer film and the front surface, e) applying a creep treatment so that the at least one dewetted zone of the front surface is covered by creep of the polymer film, and f) disassembly at the bonding interface so as to obtain the front surface completely covered by the rectified polymer film.Type: ApplicationFiled: March 28, 2024Publication date: October 3, 2024Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Pierre MONTMEAT, Franck FOURNEL, Thierry ENOT
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Publication number: 20230420408Abstract: A manufacturing method of a structure intended for assembly with another structure by self-aligning bonding by hydrophilic contrast, including the following successive steps: a) definition of pads on the side of the first face of a first substrate; b) transfer of a second substrate on the side of the first face of the first substrate; c) formation on the sides and/or on a peripheral part of the upper face of the pads, of a material more hydrophobic than a material of the upper face of the pads; and d) removal of the second substrate.Type: ApplicationFiled: June 22, 2023Publication date: December 28, 2023Applicant: Commissaria à l'Énergie Atomique et aux Énergies AlternativesInventors: Pierre Montmeat, Frank Fournel, Thierry Enot
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Patent number: 11569115Abstract: A method of temporary bonding of an object having first and second opposite surfaces successively including bonding the object to a handle on the side of the first surface, bonding the object to a first adhesive film on the side of the second surface, bonding the first adhesive film to a second adhesive film on the side opposite to the object, and removing the handle from the object.Type: GrantFiled: June 8, 2021Date of Patent: January 31, 2023Assignee: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Pierre Montmeat, Frank Fournel, Laurent Bally, Thierry Enot
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Patent number: 11335584Abstract: A method for disassembling a stack of at least three substrates. The invention relates to the techniques for transferring thin films in the microelectronics field. It proposes a method for disassembling a stack of at least three substrates having between them two interfaces, one interface of which has an adhesion energy and an interface of which has an adhesion energy, with less than, the method comprising: 1) implementing a removal of material on the first substrate, in order to expose a surface of the second substrate, 2) transferring the stack onto a flexible adhesive film so that the surface has, with an adhesive layer of the film, an adhesion energy greater than, and 3) disassembling the third substrate at the interface between the second substrate and the third substrate. The method makes it possible to open the stack via the interface thereof with the highest adhesion energy.Type: GrantFiled: November 13, 2020Date of Patent: May 17, 2022Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Pierre Montmeat, Thierry Enot, Frank Fournel
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Publication number: 20210384061Abstract: A method of temporary bonding of an object having first and second opposite surfaces successively including bonding the object to a handle on the side of the first surface, bonding the object to a first adhesive film on the side of the second surface, bonding the first adhesive film to a second adhesive film on the side opposite to the object, and removing the handle from the object.Type: ApplicationFiled: June 8, 2021Publication date: December 9, 2021Applicant: Commissariat à I'Énergie Atomique et aux Énergies AlternativesInventors: Pierre Montmeat, Frank Fournel, Laurent Bally, Thierry Enot
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Publication number: 20210175112Abstract: A method for disassembling a stack of at least three substrates. The invention relates to the techniques for transferring thin films in the microelectronics field. It proposes a method for disassembling a stack of at least three substrates having between them two interfaces, one interface of which has an adhesion energy and an interface of which has an adhesion energy, with less than, the method comprising: 1) implementing a removal of material on the first substrate, in order to expose a surface of the second substrate, 2) transferring the stack onto a flexible adhesive film so that the surface has, with an adhesive layer of the film, an adhesion energy greater than, and 3) disassembling the third substrate at the interface between the second substrate and the third substrate. The method makes it possible to open the stack via the interface thereof with the highest adhesion energy.Type: ApplicationFiled: November 13, 2020Publication date: June 10, 2021Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Pierre MONTMEAT, Thierry ENOT, Frank FOURNEL
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Patent number: 8112882Abstract: A method for producing a structure includes bonding two substrates facing one another by crushing a closed peripheral sealing strip located between the two substrates, the closed peripheral sealing strip delineating a closed cavity between the substrates. A microsystem is disposed on one of the substrates within the closed cavity. Before crushing, the sealing strip includes perforated patterns delineating a plurality of voids inside the strip.Type: GrantFiled: October 9, 2008Date of Patent: February 14, 2012Assignee: Commissariat a l'Energie AtomiqueInventors: Xavier Baillin, Jean Brun, Thierry Enot, David Henry
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Patent number: 7794610Abstract: The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.Type: GrantFiled: December 23, 2004Date of Patent: September 14, 2010Assignee: Commissariat a l'Energie AtomiqueInventors: Claire Divoux, Marie-Helene Vaudaine, Thierry Enot
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Publication number: 20090094816Abstract: The structure comprises facing substrates bonded to one another by crushing a closed peripheral sealing strip delineating a closed cavity in which a microsystem is disposed between the substrates. Before crushing, the sealing strip comprises perforated patterns delineating a plurality of voids inside the strip.Type: ApplicationFiled: October 9, 2008Publication date: April 16, 2009Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUEInventors: Xavier Baillin, Jean Brun, Thierry Enot, David Henry
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Publication number: 20070137989Abstract: The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.Type: ApplicationFiled: December 23, 2004Publication date: June 21, 2007Inventors: Claire Divoux, Marie-Helene Vaudaine, Thierry Enot