Patents by Inventor Thierry Enot

Thierry Enot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240326087
    Abstract: A method for rectifying a polymer film including the steps of: a) providing a first substrate including a front surface, the front surface having a surface energy less than approximately 22 mJ/m2, b) spreading a thermoplastic polymer on the front surface leading to the formation of a polymer film and at least one dewetted zone of the front surface, c) providing a second substrate including a non-stick surface, d) bonding the polymer film and the non-stick surface leading to the formation of a bonding interface having an adhesion energy lower than the adhesion energy between the polymer film and the front surface, e) applying a creep treatment so that the at least one dewetted zone of the front surface is covered by creep of the polymer film, and f) disassembly at the bonding interface so as to obtain the front surface completely covered by the rectified polymer film.
    Type: Application
    Filed: March 28, 2024
    Publication date: October 3, 2024
    Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Pierre MONTMEAT, Franck FOURNEL, Thierry ENOT
  • Publication number: 20230420408
    Abstract: A manufacturing method of a structure intended for assembly with another structure by self-aligning bonding by hydrophilic contrast, including the following successive steps: a) definition of pads on the side of the first face of a first substrate; b) transfer of a second substrate on the side of the first face of the first substrate; c) formation on the sides and/or on a peripheral part of the upper face of the pads, of a material more hydrophobic than a material of the upper face of the pads; and d) removal of the second substrate.
    Type: Application
    Filed: June 22, 2023
    Publication date: December 28, 2023
    Applicant: Commissaria à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Pierre Montmeat, Frank Fournel, Thierry Enot
  • Patent number: 11569115
    Abstract: A method of temporary bonding of an object having first and second opposite surfaces successively including bonding the object to a handle on the side of the first surface, bonding the object to a first adhesive film on the side of the second surface, bonding the first adhesive film to a second adhesive film on the side opposite to the object, and removing the handle from the object.
    Type: Grant
    Filed: June 8, 2021
    Date of Patent: January 31, 2023
    Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Pierre Montmeat, Frank Fournel, Laurent Bally, Thierry Enot
  • Patent number: 11335584
    Abstract: A method for disassembling a stack of at least three substrates. The invention relates to the techniques for transferring thin films in the microelectronics field. It proposes a method for disassembling a stack of at least three substrates having between them two interfaces, one interface of which has an adhesion energy and an interface of which has an adhesion energy, with less than, the method comprising: 1) implementing a removal of material on the first substrate, in order to expose a surface of the second substrate, 2) transferring the stack onto a flexible adhesive film so that the surface has, with an adhesive layer of the film, an adhesion energy greater than, and 3) disassembling the third substrate at the interface between the second substrate and the third substrate. The method makes it possible to open the stack via the interface thereof with the highest adhesion energy.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: May 17, 2022
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Pierre Montmeat, Thierry Enot, Frank Fournel
  • Publication number: 20210384061
    Abstract: A method of temporary bonding of an object having first and second opposite surfaces successively including bonding the object to a handle on the side of the first surface, bonding the object to a first adhesive film on the side of the second surface, bonding the first adhesive film to a second adhesive film on the side opposite to the object, and removing the handle from the object.
    Type: Application
    Filed: June 8, 2021
    Publication date: December 9, 2021
    Applicant: Commissariat à I'Énergie Atomique et aux Énergies Alternatives
    Inventors: Pierre Montmeat, Frank Fournel, Laurent Bally, Thierry Enot
  • Publication number: 20210175112
    Abstract: A method for disassembling a stack of at least three substrates. The invention relates to the techniques for transferring thin films in the microelectronics field. It proposes a method for disassembling a stack of at least three substrates having between them two interfaces, one interface of which has an adhesion energy and an interface of which has an adhesion energy, with less than, the method comprising: 1) implementing a removal of material on the first substrate, in order to expose a surface of the second substrate, 2) transferring the stack onto a flexible adhesive film so that the surface has, with an adhesive layer of the film, an adhesion energy greater than, and 3) disassembling the third substrate at the interface between the second substrate and the third substrate. The method makes it possible to open the stack via the interface thereof with the highest adhesion energy.
    Type: Application
    Filed: November 13, 2020
    Publication date: June 10, 2021
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Pierre MONTMEAT, Thierry ENOT, Frank FOURNEL
  • Patent number: 8112882
    Abstract: A method for producing a structure includes bonding two substrates facing one another by crushing a closed peripheral sealing strip located between the two substrates, the closed peripheral sealing strip delineating a closed cavity between the substrates. A microsystem is disposed on one of the substrates within the closed cavity. Before crushing, the sealing strip includes perforated patterns delineating a plurality of voids inside the strip.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: February 14, 2012
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Xavier Baillin, Jean Brun, Thierry Enot, David Henry
  • Patent number: 7794610
    Abstract: The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.
    Type: Grant
    Filed: December 23, 2004
    Date of Patent: September 14, 2010
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Claire Divoux, Marie-Helene Vaudaine, Thierry Enot
  • Publication number: 20090094816
    Abstract: The structure comprises facing substrates bonded to one another by crushing a closed peripheral sealing strip delineating a closed cavity in which a microsystem is disposed between the substrates. Before crushing, the sealing strip comprises perforated patterns delineating a plurality of voids inside the strip.
    Type: Application
    Filed: October 9, 2008
    Publication date: April 16, 2009
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Xavier Baillin, Jean Brun, Thierry Enot, David Henry
  • Publication number: 20070137989
    Abstract: The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.
    Type: Application
    Filed: December 23, 2004
    Publication date: June 21, 2007
    Inventors: Claire Divoux, Marie-Helene Vaudaine, Thierry Enot