Abstract: A vacuum line and method for controlling a vacuum line in which an auxiliary pumping device and a diluent gas injection device are controlled according to a first operating mode in which the pressure prevailing in the discharge pipe is maintained at less than or equal to 20,000 Pa or according to a second operating mode in which the pressure prevailing in the discharge pipe is greater than 20,000 Pa, and the injection of a diluent gas into the stream of the pumped gases is controlled, downstream of an intake of the rough pumping device, such as into the discharge pipe and/or into the rough pumping device and/or into the auxiliary pumping device by the diluent gas injection device in the second operating mode.

Abstract: A trap is provided for a vacuum line to be mounted on a pipe connected to a reactor, the trap including: a chamber including an inlet and a bottom wall; an outlet tube in communication with the chamber and including another inlet, the inlet and the outlet tube are configured to be connected to the pipe and to permit passage of a flow of gas to be pumped coming from the reactor; and a deflector between the inlet and the another inlet, the bottom wall being below the another inlet and being an annular cup or an adjustable height cup, and conformed so as to cooperate with the deflector to permit an accumulation of solid elements in the bottom wall when the flow of gas is reduced and to expel the solid elements from the chamber by aerodynamic entrainment when the flow of gas is increased.

Abstract: A rough-vacuum pump of dry type includes a duct formed in the stator and of which an inlet orifice is intended to be connected to at least one source of purge gas and of which at least one outlet orifice communicates with the last pumping stage communicating with the delivery and a device for injecting a heated purge gas including a heating device to at least partly heat the purge gas injected into the duct to a temperature higher than 40° C.

Abstract: A dry roughing vacuum pump includes a valve (10; 15) with a through-passage arranged in the discharge line (9), the valve (10) with a through-passage being able to move between a closed position in which the valve (10; 15) with a through-passage is in contact with a seat of a mouth (12) of the discharge line (9) and an open position in which the valve with a through-passage is moved away from the mouth (12) of the discharge line (9), the vacuum pump including a motor gas injection device (13) that is configured to inject a motor gas into the inlet (11a) of the Venturi-effect passage (11).

Abstract: A container-less JSP system is provided. An example container-less JSP system comprises a detector, a trigger module, and an invoker. The detector may be configured to detect a request initiated by a client application to invoke a JSP template. The request is a protocol-neutral Java™ interface. The trigger module may be configured to trigger the protocol-neutral Java™ interface to invoke the JSP template. The invoker may be configured to invoke the JSP template.

Abstract: A dry roughing vacuum pump includes a valve (10; 15) with a through-passage arranged in the discharge line (9), the valve (10) with a through-passage being able to move between a closed position in which the valve (10; 15) with a through-passage is in contact with a seat of a mouth (12) of the discharge line (9) and an open position in which the valve with a through-passage is moved away from the mouth (12) of the discharge line (9), the vacuum pump including a motor gas injection device (13) that is configured to inject a motor gas into the inlet (11a) of the Venturi-effect passage (11).

Abstract: A pumping device and method are described. The pumping device comprises a dry rough vacuum pump equipped with a gas inlet connected to a vacuum chamber, a gas outlet leading to a conduit and an ejector. The pumping method comprises pumping gases contained in the vacuum chamber using the dry rough vacuum pump through the gas inlet, measuring electric power consumed by the dry rough vacuum pump and the pressure of the gases in the conduit, starting the ejector, when the pressure of the gases at the outlet and the electrical power consumed cross respective set point values as they rise and stopping the ejector when the electric power consumed and the pressure of the gases in the conduit at the outlet cross respective set point values as they fall.

Abstract: A pumping device and method are described. The pumping device comprises a dry rough vacuum pump equipped with a gas inlet connected to a vacuum chamber, a gas outlet leading to a conduit and an ejector. The pumping method comprises pumping gases contained in the vacuum chamber using the dry rough vacuum pump through the gas inlet, measuring electric power consumed by the dry rough vacuum pump and the pressure of the gases in the conduit, starting the ejector, when the pressure of the gases at the outlet and the electrical power consumed cross respective set point values as they rise and stopping the ejector when the electric power consumed and the pressure of the gases in the conduit at the outlet cross respective set point values as they fall.

Abstract: The embodiments of the present invention describe a gas discharge pipe comprising a first discharge channel and at least one second discharge channel designed to be connected respectively to a first vacuum pump and to at least a second vacuum pump on the one hand and to a reactor outlet on the other hand, in which the first discharge channel and at least the second discharge channel comprise first means and at least second means for injecting an inert gas in which the direction of injection is respectively oriented opposite to the direction of suction of the vacuum pumps.

Abstract: A pumping system comprising at least one pump unit (2) with a vacuum pump casing in which there are multiple pumping stages that includes at least one pumped gas treatment system is provided. The pumped gas treatment system compromises at least one plasma source located inside the vacuum pump casing of the pump unit, to generate a plasma that at least partially decomposes certain gases passing through the pump unit. This reduces the size of the pumped gas treatment system and improves its efficiency so that a gas pumping and treatment system can be created that is sufficiently small as to allow it to be placed in close proximity to the process chambers.

Abstract: A container-less JSP system is provided. An example container-less JSP system comprises a detector, a trigger module, and an invoker. The detector may be configured to detect a request initiated by a client application to invoke a JSP template. The request is a protocol-neutral Java™ interface. The trigger module may be configured to trigger the protocol-neutral Java™ interface to invoke the JSP template. The invoker may be configured to invoke the JSP template.

Abstract: According to the invention, a pumping system comprises at least one pump unit (2) with a vacuum pump casing in which there are multiple pumping stages (5, 6, 7, 8, 9) that includes at least one pumped gas treatment system, characterised by the fact that the pumped gas treatment compromises at least one plasma source (15, 16, 26, 27), located inside the vacuum pump casing of the pump unit (2), to generate a plasma that at least partially decomposes certain gases passing through the pump unit (2). This considerably reduces the size of the pumped gas treatment system and improves its efficiency so that a gas pumping and treatment system can be created that is sufficiently small as to allow it to be placed in close proximity to the process chambers.