Patents by Inventor Thierry Poumeyrol

Thierry Poumeyrol has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120133028
    Abstract: A semiconductor structure includes a thin semiconductor layer fixed on an applicator or flexible support, the thin layer having an exposed surface characterized by fractured solid bridges spaced apart by cavities. A method of producing the thin layer of semiconductor material includes implanting ions into the semiconductor wafer to define a reference plane, where the ion dose is above a minimum dose, but below a critical dose so as to avoid degrading the wafer surface. The method further includes applying a thermal treatment to define a layer of microcavities and applying stress to free the thin layer from the wafer.
    Type: Application
    Filed: November 28, 2011
    Publication date: May 31, 2012
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 8101503
    Abstract: A semiconductor structure includes a thin semiconductor layer fixed on an applicator or flexible support, the thin layer having an exposed surface characterized by fractured solid bridges spaced apart by cavities. A method of producing the thin layer of semiconductor material includes implanting ions into the semiconductor wafer to define a reference plane, where the ion dose is above a minimum dose, but below a critical dose so as to avoid degrading the wafer surface. The method further includes applying a thermal treatment to define a layer of microcavities and applying stress to free the thin layer from the wafer.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: January 24, 2012
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Publication number: 20090130392
    Abstract: A semiconductor structure includes a thin semiconductor layer fixed on an applicator or flexible support, the thin layer having an exposed surface characterized by fractured solid bridges spaced apart by cavities. A method of producing the thin layer of semiconductor material includes implanting ions into the semiconductor wafer to define a reference plane, where the ion dose is above a minimum dose, but below a critical dose so as to avoid degrading the wafer surface. The method further includes applying a thermal treatment to define a layer of microcavities and applying stress to free the thin layer from the wafer.
    Type: Application
    Filed: December 12, 2008
    Publication date: May 21, 2009
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 7498234
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including: a step of implanting ions through a flat face (2) of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face, a thermal treatment step in order to achieve coalescence of the microcavities possibly, a step of creating at least one electronic component (5) in the thin layer (6), a separation step of separating the thin layer (6) from the rest (7) of the wafer.
    Type: Grant
    Filed: January 9, 2006
    Date of Patent: March 3, 2009
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 7067396
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including: a step of implanting ions through a flat face (2) of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face, a thermal treatment step in order to achieve coalescence of the microcavities possibly, a step of creating at least one electronic component (5) in the thin layer (6), a separation step of separating the thin layer (6) from the rest (7) of the wafer.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: June 27, 2006
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Publication number: 20060115961
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including a step of implanting ions through a flat face (2) of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face, a thermal treatment step in order to achieve coalescence of the microcavities possibly, a step of creating at least one electronic component (5) in the thin layer (6), a separation step of separating the thin layer (6) from the rest (7) of the wafer.
    Type: Application
    Filed: January 9, 2006
    Publication date: June 1, 2006
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 6809009
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including: a step of implanting ions through a flat face (2) of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face, a thermal treatment step in order to achieve coalescence of the microcavities a possibly, a step of creating at least one electronic component (5) in the thin layer (6), a separation step of separating the thin layer (6) from the rest (7) of the wafer.
    Type: Grant
    Filed: February 6, 2001
    Date of Patent: October 26, 2004
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Publication number: 20040166651
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including:-a step of implanting ions through a flat face (2) of a semiconductor wafer in order to creat a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face,-a thermal treatment step in order to achieve coalescence of the microcavities-possibly, a step of creating at least one electronic component (5) in the thin layer (6), -a separation step of separating the thin layer (6) from the rest (7) of the wafer.
    Type: Application
    Filed: February 23, 2004
    Publication date: August 26, 2004
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: BERNARD ASPAR, MICHEL BRUEL, THIERRY POUMEYROL
  • Publication number: 20010007789
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including:
    Type: Application
    Filed: February 6, 2001
    Publication date: July 12, 2001
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 6225192
    Abstract: The invention relates to a method of producing a thin layer of semiconductor material including: a step of implanting ions through a flat face (2) of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face, a thermal treatment step in order to achieve coalescence of the microcavities possibly, a step of creating at least one electronic component (5) in the thin layer (6), a separation step of separating the thin layer (6) from the rest (7) of the wafer.
    Type: Grant
    Filed: April 26, 1999
    Date of Patent: May 1, 2001
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 6020252
    Abstract: A thin layer of semiconductor material is produced by implanting ions through a flat face of a semiconductor wafer in order to create a layer of microcavities, the ion dose being within a specific range in order to avoid the formation of blisters on the flat face. The resulting wafer is then subjected to a thermal treatment step in order to achieve coalescence of the microcavities. During or following the thermal treatment, a thin layer is separated from the rest of the wafer by application of mechanical force.
    Type: Grant
    Filed: May 14, 1997
    Date of Patent: February 1, 2000
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Aspar, Michel Bruel, Thierry Poumeyrol
  • Patent number: 5863830
    Abstract: A process for the production of a structure having a thin semiconductor film (2) adhering to a target substrate (24). The process which is applicable to the production of electronic components comprises the steps ofa) producing a first structure having a thin semiconductor film (2) on a first substrate, andb) transferring of the thin film (2) from the first substrate to the target substrate.
    Type: Grant
    Filed: September 18, 1995
    Date of Patent: January 26, 1999
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Michel Bruel, Thierry Poumeyrol