Abstract: An inertial sensor including a substrate, sense frames, drive frames configured to put into motion the sense frames, and a sense lever pivotably mounted around a rotation axis. The sense frames, drive frames and sense lever are connected to each other in such a way that when the inertial sensor is subjected to a rotational movement around the rotation axis, the first sense frame, the second sense frame and the sense lever respectively feature a first tilt ?1 a second tilt ?2 and a lever tilt ?s relatively to the device plane, and both ?1/?s and ?2/?s are lower than 0.1. The inertial sensor features strain gauges that get stressed when the lever rotates due to the motion of the sense frames.

Abstract: A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ?a, an element that measures a force including at least one resonator of resonant frequency ?rn, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ?d is such that ?a<?d<?rn, the decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

Abstract: The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Abstract: A mechanical link for microelectromechanical and/or nanoelectromechanical structure, includes a mobile component, a fixed component extending on a plane, and apparatus for detecting displacement of the mobile component relative to the fixed component. The mechanical link includes: a first link to the fixed component and mobile component, allowing rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection apparatus at a distance and perpendicular to the axis of rotation; a third link to the fixed component and detection apparatus, guiding the detection apparatus in a direction of translation in the plane; wherein the combination of the second link and third link can transform rotational movement of the mobile component into translational movement of the detection apparatus in the direction of translation.

Abstract: The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Abstract: A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ?a, means for measuring a force including at least one resonator of resonant frequency ?rn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ?d is such that ?a <?d< ?rn, said decoupling structure forming a mechanical low-pass filter between the proof body and the resonator. FIG.

Abstract: A hinge for a micromechanical and/or nanomechanical structure includes: a support, and a movable part in an out-of-plane direction. The hinge allows for the out-of-plane displacement of the movable part. The hinge further includes two torsion beams extending along the axis of rotation of the hinge, two bending elements mechanically connecting the movable part and the support and having at least one pair of a first and of a second beam parallel with each other and extending in a plane perpendicular to the axis of rotation, the first beam being connected to the support and the second beam being connected to the movable part, the first and second beams being connected to one another by a first connecting element at a longitudinal end, the two beams extending in the same direction from the first connecting element.

Abstract: A hinge between a support and a movable part in an out-of-plane direction of a microelectromechanical structure includes two torsion beams, and two bending elements connecting the movable part and the support and each comprising two beams extending perpendicularly to the axis of rotation. Each beam is connected to the support by a first end and to the movable part by a second end, the first ends and the second ends of the beams being disposed with respect to one another in such a way that the orientation of the first end towards the second end of one beam is opposite to the orientation of the first end towards the second end of the other beam.

Abstract: A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

Abstract: A mechanical link for a microelectromechanical and/or nanoelectromechanical structure, the structure includes a mobile component, a fixed component extending on a main plane and means for detecting the displacement of the mobile component relative to the fixed component, the mechanical link comprising: a first link linked to the fixed component and to the mobile component and capable of allowing the rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection means at a given distance relative to the axis of rotation in a direction at right angles to the axis of rotation; a third link linked to the fixed component and to the detection means, and configured to guide the detection means in translation in a direction of translation in the plane of the fixed component; such that the combination of the second link and of the third link is capable of transforming the rotational movement of the mobile component into a trans

Abstract: Hinge between a support and a movable part in an out-of-plane direction of a microelectromechanical structure, the hinge comprising two torsion beams, two bending elements connecting the movable part and the support and each comprising two beams extending perpendicularly to the axis of rotation each beam being connected to the support by a first end and to the movable part by a second end, the first ends and the second ends of the beams being disposed with respect to one another in such a way that the orientation of the first end towards the second end of one beam is opposed to the orientation of the first end towards the second end of the other beam.

Abstract: Hinge for a micromechanical and/or nanomechanical structure comprising a support, a movable part in an out-of-plane direction, said hinge allowing for the out-of-plane displacement of the movable part, the hinge comprising two torsion beams extending along the axis of rotation of the hinge, two bending elements mechanically connecting the movable part and the support and comprising at least one pair of a first and of a second beam parallel with each other and extending in a plane perpendicular to the axis of rotation, the first beam being connected to the support and the second beam being connected to the movable part, the first and second beams being connected to one another by a first connecting element at a longitudinal end, the two beams extending in the same direction from the first connecting element.

Abstract: A MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion movable relative to the stationary portion, the movable portion including a sensitive element configured to move in the plane of the sensor under effect of a pressure variation; a stress gauge detecting movement of the sensitive element in the plane of the sensor due to the pressure variation; electrodes actuating the sensitive element, the actuating electrodes being borne partially by the stationary portion and partially by the movable portion, the actuating electrodes being commanded to automatically control positionwise the movement of the sensitive element; a mechanism commanding the actuating electrodes, which is configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes to automatically control positionwise the movement of the sensitive element.

Abstract: A system is disclosed for suspension of a mobile mass, such as an inertial angular sensor, including a connection device including first and second connection elements connected to each other through a connection block and deformable in bending in a mobility plane so as to enable displacements relative to the connection block, of the mobile mass connected to the first connection element, and of another element of the system connected to the second connection element such as a support or another mobile mass respectively, along two distinct directions respectively. At least one of the connection elements is formed from two springs, connecting the connection block to the mobile mass or the other element of the system respectively. The connection element thus has improved linearity properties.

Abstract: A MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion movable relative to the stationary portion, the movable portion including a sensitive element configured to move in the plane of the sensor under effect of a pressure variation; a stress gauge detecting movement of the sensitive element in the plane of the sensor due to the pressure variation; electrodes actuating the sensitive element, the actuating electrodes being borne partially by the stationary portion and partially by the movable portion, the actuating electrodes being commanded to automatically control positionwise the movement of the sensitive element; a mechanism commanding the actuating electrodes, which are configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes to automatically control positionwise the movement of the sensitive element.