Patents by Inventor Thilo Sander

Thilo Sander has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090097087
    Abstract: The invention relates to a micromechanical sensor- or actuator component with an optical function and to a production method. A substrate thereby has electrodes and electrical contactings, an optical, electrically actuated element which can be deflected relative to the substrate. A transparent cover is likewise present. The object of the invention is to produce a micromechanical sensor- or actuator component with an optical function and a method for the production of such components with which to reduce or even avoid reflections which might impair the function of the micromechanical sensor- or actuator component. According to the invention, the optical main axis of the cover is thereby orientated non-perpendicular to the surface of the substrate.
    Type: Application
    Filed: October 15, 2008
    Publication date: April 16, 2009
    Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Alexander Wolter, Thilo Sander, Harald Schenk