Patents by Inventor Thin Luu

Thin Luu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for defect segmentation in features on semiconductor substrates
    Publication number: 20050008217
    Abstract: A method for defect segmentation in features on semiconductor substrates is disclosed. After acquisition of an image of a semiconductor substrate, identical features or feature elements are subtracted from one another. The resulting difference function is compared with an upper and a lower threshold in order to identify defects.
    Type: Application
    Filed: July 6, 2004
    Publication date: January 13, 2005
    Inventors: Thin Luu, Bernd Jungmann, Detlef Michelsson