Abstract: There is provided a scanning laser beam delivery system for use in pulsed laser deposition of a target evaporant (40) onto a substrate (50). The system includes a laser beam source (10) for generating a pulsed laser beam, a beam transfer assembly (20) optically coupled to laser beam source (10) for directing the generated pulse laser beam along an optical path (15) having a terminal segment (15') which impinges upon target evaporant (40); and, a control mechanism (30) coupled to beam transfer assembly (20). Beam transfer assembly (20) includes a scanning mechanism (22) for reversibly translating terminal segment (15') of optical path (15) along a scan direction substantially normal to the direction along which terminal segment (15') has a directional component. Actuation of scanning mechanism (22) is automatically controlled by control mechanism (30).